Differential critical dimension and overlay metrology apparatus and measurement method

• US 8,035,824 B2
• Filed: 10/28/2009
• Issued: 10/11/2011
• Est. Priority Date: 12/19/2003
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Ausschnitt, Christopher
• Primary Examiner(s): Young; Christopher
• Application Number:
  US12/607,392
• Publication Number:
  US 20100103433A1
• Time in Patent Office: 713 Days
• Field of Search: 430/30, 356/401, 356/625, 356/634, 356/635, 356/636
• US Class Current: 356/636
• CPC Class Codes: B81C 99/0065 Process control; Yield prediction
• CPC Class Codes: G03F 7/70608 Monitoring the unpatterned workpiece, e.g. measuring thickness, reflectivity or effects of immersion liquid on resist
• CPC Class Codes: G03F 7/70625 Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
• CPC Class Codes: G03F 7/70633 Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching
• CPC Class Codes: G03F 7/70691 Handling of masks or workpieces

Abstract

A method is described for measuring a dimension on a substrate, wherein a target pattern is provided with a nominal characteristic dimension that repeats at a primary pitch of period P, and has a pre-determined variation orthogonal to the primary direction. The target pattern formed on the substrate is then illuminated so that at least one non-zero diffracted order is detected. The response of the non-zero diffracted order to variation in the printed characteristic dimension relative to nominal is used to determine the dimension of interest, such as critical dimension or overlay, on the substrate. An apparatus for performing the method of the present invention includes an illumination source, a detector for detecting a non-zero diffracted order, and means for positioning the source relative to the target so that one or more non-zero diffracted orders from the target are detected at the detector.

Claims

1. An apparatus for measuring a dimension on a substrate comprising:

a source of radiation for illuminating said target pattern;

collection optics configured to collect said one or more non-zeroth orders along said primary direction and to image said target pattern along said substantially orthogonal direction; and

a detector array configured to detect spatial variations of said one or more non-zeroth orders from said collection optics along said substantially orthogonal direction and along said primary direction.

2. The apparatus of claim 1 further comprising a computer system comprising a computer readable storage medium, said computer readable storage medium comprising instructions for causing said computer system to determine said dimension of interest in accordance with said relationship, based on said detected measurable quantity of said one or more non-zeroth orders of said diffracted radiation.

3. The apparatus of claim 1 further configured to provide a second detector for detecting zeroth order radiation diffracted from said substrate, said apparatus further comprising means for determining film thickness from said zeroth order radiation.

4. The apparatus of claim 1 wherein said apparatus is configured for in-line processing for semiconductor manufacturing.

5. The apparatus of claim 4 wherein said target pattern comprises a first region having features of a first tone, and a second region having features of a second tone different from said first tone, wherein the method further comprises comparing measurements obtained from said first region with measurements obtained from said second region to determine effects of process conditions.

6. The apparatus of claim 5 wherein said process conditions are selected from the group consisting of dose, focus or a combination thereof.

7. The apparatus of claim 5 further comprising means for determining a deviation in said process conditions from nominal process conditions based on said dimension of interest.

8. The apparatus of claim 7 further comprising means for providing adjustments in subsequent process conditions in response to said deviation in process conditions.