Microelectromechanical gyroscope with open loop reading device and control method
First Claim
1. A microelectromechanical gyroscope, comprising:
- a first mass oscillatable according to a first axis;
an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis in response to a rotation of the gyroscope;
a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency;
an open-loop reading device coupled to the inertial sensor and adapted to detect displacements of the second mass according to the second axis; and
a read signal generator adapted to supply to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.
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Abstract
A microelectromechanical gyroscope that includes a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis, in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; and an open-loop reading device coupled to the inertial sensor for detecting displacements of the second mass according to the second axis. The driving device includes a read signal generator for supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency.
39 Citations
18 Claims
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1. A microelectromechanical gyroscope, comprising:
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a first mass oscillatable according to a first axis; an inertial sensor, including a second mass, drawn along by the first mass and constrained so as to oscillate according to a second axis in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; an open-loop reading device coupled to the inertial sensor and adapted to detect displacements of the second mass according to the second axis; and a read signal generator adapted to supply to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for controlling a microelectromechanical gyroscope, comprising the steps of:
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providing a first mass, oscillatable according to a first axis; coupling an inertial sensor having a second mass to the first mass so that the second mass is drawn along by the first mass and oscillates according to a second axis in response to a rotation of the gyroscope; feedback controlling a movement of the first mass to maintain the first mass in oscillation at a resonance frequency; and open-loop detecting displacements of the second mass according to the second axis; wherein the step of open-loop detecting comprises supplying to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies at the resonance frequency. - View Dependent Claims (14, 15)
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16. A system, comprising:
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a control unit; and a microelectromechanical gyroscope comprising; a first mass oscillatable according to a first axis; an inertial sensor that includes a second mass drawn along by the first mass and constrained so as to oscillate according to a second axis in response to a rotation of the gyroscope; a driving device coupled to the first mass so as to form a feedback control loop and configured to maintain the first mass in oscillation at a resonance frequency; an open-loop reading device coupled to the inertial sensor and adapted to detect displacements of the second mass according to the second axis; and a read signal generator adapted to supply to the inertial sensor at least one read signal having the form of a square-wave signal of amplitude that sinusoidally varies with the resonance frequency. - View Dependent Claims (17, 18)
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Specification