×

Parametric amplification of a MEMS gyroscope by capacitance modulation

  • US 8,037,757 B2
  • Filed: 04/30/2008
  • Issued: 10/18/2011
  • Est. Priority Date: 12/12/2007
  • Status: Active Grant
First Claim
Patent Images

1. A method for operating a Micro-Electro-Mechanical Systems (MEMS) gyroscope sensor, comprising:

  • inducing a motor motion to a proof mass, the proof mass capacitively coupled to a sense electrode via a gap between mating comb fingers of at least one comb finger pair that define a sense capacitance between the proof mass and the electrode, the shape of the sense electrode such that motion along the motor axis produces a variation in sense capacitance whereby the capacitance is variable as a function of a displacement in a position of the mated comb fingers caused by the induced motor motion; and

    producing a time-varying electrical output in response to a rotation of the MEMS gyroscope, wherein the time-varying electrical output is amplified by the capacitance variation caused by the induced motor motion and the shape of the sense electrode.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×