Method and apparatus for fluid processing a workpiece

• US 8,038,856 B2
• Filed: 05/24/2010
• Issued: 10/18/2011
• Est. Priority Date: 10/22/2003
• Status: Active Grant

• Current Assignee: Asmpt NEXX Incorporated
• Original Assignee: NEXX Systems, Inc.
• Inventors: Keigler, Arthur, Liu, Zhenqiu, Harrell, John, Wu, Qunwei
• Primary Examiner(s): BELL, BRUCE F
• Application Number:
  US12/786,219
• Publication Number:
  US 20100295225A1
• Time in Patent Office: 512 Days
• Field of Search: 204/297.01, 204/298.11, 204/286.1, 204/288.3, 204/288.4, 204/288.5, 204/297.06, 204/297.1, 204/297.13, 204/297.14, 204/297.15, 118/500, 118/504, 118/505, 269/37, 269/43, 269/287, 277/309, 277/312, 277/500, 277/549
• US Class Current: 204/297.06
• CPC Class Codes: C25D 17/001 Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
• CPC Class Codes: C25D 17/005 Contacting devices
• CPC Class Codes: C25D 17/06 Suspending or supporting devices for articles to be coated
• CPC Class Codes: C25D 21/10 Agitating of electrolytes; Moving of racks
• CPC Class Codes: C25D 21/12 Process control or regulation controlling or regulating in general G05
• CPC Class Codes: C25D 5/003 Electroplating using gases, e.g. pressure influence
• CPC Class Codes: C25D 7/123 Semiconductors first coated with a seed layer or a conductive layer
• CPC Class Codes: H01L 21/67023 for general liquid treatment, e.g. etching followed by cleaning
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28

Abstract

A method of fluid sealing a workpiece is provided. The method includes placing a workpiece on a ring, engaging at least one engagement feature of the ring with at least one retaining feature defined by the member and flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.

Claims

1. A method of fluid sealing a workpiece, comprising:

placing a workpiece on a ring;

engaging at least one engagement feature of the ring with at least one retaining feature defined by a member; and

flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.

2. The method of claim 1 wherein the force causes the member to pull the at least one engagement feature of the ring to cause the ring to push against the workpiece to form the barrier to fluid entry.

3. The method of claim 1 further comprising providing the force at least substantially uniformly from a perimeter of the member via a plurality of flex features positioned about the perimeter.

4. The method of claim 1 further comprising rotating the ring to lock the at least one engagement feature of the ring into the at least ode retaining feature of the member.

5. The method of claim 1 further comprising applying the force substantially normal to the plane of the member using at least one flex feature of the member.

6. The method of claim 1 further comprising moving a backing member to flex the member.

7. The method of claim 6 further comprising deflating a bladder to move the backing member away from the member.

8. The method of claim 1 further comprising testing the integrity of the barrier to fluid entry.

9. The method of claim 1 wherein the member includes an over-extended state in which the at least one retaining feature captures the at least one engagement feature of the ring prior to flexing the member.

10. The method of claim 1 further comprising depositing a metal or a plastic on a surface of the workpiece.

11. The method of claim 1 further comprising dissoluting a metal or a plastic on a surface of the workpiece.

12. The method of claim 1 further comprising processing a plurality of surfaces of the workpiece via a hole defined by the workpiece holder, the hole passing from a first surface of a workpiece holder to a second surface of the workpiece holder, the diameter of the hole being smaller than the diameter of the ring.

13. An apparatus for applying force to an object, comprising:

a substantially planar, ring-shaped member defining a plurality of flex features positioned about a perimeter of the member, the plurality of flex features providing a force at least substantially uniformly around the perimeter of the object when the member is flexed.

14. The apparatus of claim 13 wherein the member defines at least one retaining feature engageable with at least one engagement feature of a ring.

15. The apparatus of claim 13 wherein the object has a substantially non-circular shape.

16. The apparatus of claim 13 further comprising a backing member adapted to apply a force to flex the member.

17. The apparatus of claim 16 wherein the backing member comprises push pins to contact the member.

18. The apparatus of claim 15 further comprising an inflatable bladder adjacent the backing member for moving the backing member to apply the force to flex the member.

19. The apparatus of claim 14 further comprising a workpiece holder to which the member and the ring are removably attached.

20. The apparatus of claim 19 wherein the member comprises at least one tab section for engaging at least one tooth feature of the workpiece holder.

21. The apparatus of claim 19 wherein the workpiece holder defines a hole that passes from a first surface to a second surface of the workpiece holder, the diameter being smaller than the diameter of the ring, the hole for processing a plurality of surfaces of the object.

22. A method for applying a uniform force to an object, comprising:

providing a member having a substantially planar, ring shape;

providing a plurality of flex features positioned about a perimeter of the member; and

flexing the member to provide a force from the plurality of flex features at least substantially uniformly around the perimeter of an object.

23. The method of claim 22 further comprising providing the force substantially normal to the plane of the member.

24. The method of claim 22 further comprising retaining the object with a ring while the force is applied.

25. The method of claim 24 further comprising rotating the ring to lock at least one engagement feature of the ring into at least one retaining feature defined by the member.

26. The method of claim 22 wherein the object has a substantially non-circular shape.

27. The method of claim 24 further comprising retaining the object against a portion of a surface of a workpiece holder.

28. The method of claim 22 wherein the plurality of flex features are positioned about an inner perimeter of the member.

29. The method of claim 22 wherein the plurality of flex features are positioned about an outer perimeter of the member.

30. The method of claim 22 wherein the plurality of flex features are positioned about both the inner and outer perimeters of the member.

31. The method of claim 27 further comprising processing a plurality of surfaces of the object via a hole defined by the workpiece holder, the hole passing from a first surface to a second surface of the workpiece holder, the diameter of the hole being smaller than the diameter of the ring.

32. An apparatus for applying force to an object, comprising:

a substantially planar ring-shaped member defining a plurality of flex features positioned about a perimeter of the member; and

a means for flexing the member to provide a force from the plurality of flex features at least substantially uniformly around the perimeter of an object.