Display device, method of manufacturing the same and mask for manufacturing the same

• US 8,040,444 B2
• Filed: 05/15/2006
• Issued: 10/18/2011
• Est. Priority Date: 06/03/2005
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Kim, Soo-Jin, Yoon, Soo-Wan, Kim, Sang-Gab, Kim, Shi-Yul, Whangbo, Sang-Woo, Chai, Chong-Chul, Chang, Won-Kie, Lee, Hi-Kuk, Souk, Jun-Hyung
• Primary Examiner(s): Nguyen; Dung T.
• Application Number:
  US11/434,487
• Publication Number:
  US 20060274236A1
• Time in Patent Office: 1,982 Days
• Field of Search: 349 38- 43, 349/139
• US Class Current: 349/38
• CPC Class Codes: G02F 1/13458 Terminal pads
• CPC Class Codes: G02F 1/136213 Storage capacitors associated with the pixel electrode
• CPC Class Codes: G02F 1/136236 using a grey or half tone lithographic process
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A mask is provided. The mask includes a mask body, a first exposing part and a second exposing part. The first exposing part is on the mask body. The first exposing part includes a first light transmitting portion and second light transmitting portions. The first light transmitting portion exposes a portion of the photoresist film corresponding to the output terminal to a light of a first light amount. The second light transmitting portions exposes an adjacent portion of the photoresist film adjacent to the output terminal to a light of a second light amount smaller than the first light amount. The second exposing part is on the mask body. The second exposing part includes third light transmitting portions for partially exposing the photoresist film corresponding to the storage electrode to a light of a third light amount that is between the first and second light amounts.

Claims

1. A display device comprising:

a storage electrode pattern on a substrate;

a first dielectric layer on the storage electrode pattern;

a drain electrode on the first dielectric layer;

a second dielectric layer on the first dielectric layer, the second dielectric layer having a first contact hole through which a portion of the drain electrode is exposed;

an insulating layer on the second dielectric layer, the insulating layer having a second contact hole corresponding to the first contact hole and a third contact hole through which a portion of the second dielectric layer over the storage electrode pattern is exposed; and

a pixel electrode electrically connected to the drain electrode, the pixel electrode comprising a storage electrode portion in the third contact hole over the storage electrode pattern, wherein the storage electrode pattern, the first dielectric layer, the second dielectric layer and the storage electrode portion of the pixel electrode overlap to form a storage capacitor and the first dielectric layer covers an entire portion of the storage electrode pattern,

wherein a portion of the first dielectric layer formed on the storage electrode pattern directly makes contact with the second dielectric layer.

2. The display device of claim 1, wherein the first contact hole has a first opening of a first area and a second opening having a second area that is smaller than the first area, and a second opening is connected to the first opening.

3. The display device of claim 2, wherein a depth of the second opening is about half of a thickness of the insulating layer.

4. The display device of claim 1, wherein the insulating layer comprises an organic material and a photoresist material.

5. The display device of claim 1, wherein a width of the third contact hole is smaller than a width of the storage electrode pattern.

6. The display device of claim 1, wherein a position of the first contact hole is substantially the same as that of the second contact hole.

7. A display device comprising:

a storage electrode pattern interposed between a substrate and a first dielectric layer on the substrate;

a drain electrode on the first dielectric layer;

a second dielectric layer on the first dielectric layer, the second dielectric layer having a first contact hole through which a portion of the drain electrode is exposed and a surface increasing part over the storage electrode pattern;

an insulating layer on the second dielectric layer, the insulating layer having a second contact hole corresponding to the first contact hole and a third contact hole through which a portion of the surface increasing part is exposed; and

a pixel electrode electrically connected to the drain electrode, the pixel electrode including a storage electrode portion on the surface increasing part in the third contact hole over the storage electrode pattern, wherein the storage electrode pattern, the first dielectric layer, the second dielectric layer and the storage electrode portion of the pixel electrode overlap to form a storage capacitor and the first dielectric layer covers an entire portion of the storage electrode pattern,

wherein a portion of the first dielectric layer formed on the storage electrode pattern directly makes contact with the second dielectric layer.

8. The display device of claim 7, wherein the surface increasing part comprises a recess.

9. The display device of claim 7, wherein the surface increasing part has a groove shape.

10. The display device of claim 7, wherein the surface increasing part has a wave shape including a plurality of grooves and ridges.

11. The display device of claim 7, wherein the pixel electrode is a transparent electrode.

12. The display device of claim 7, wherein a position of the first contact hole is substantially the same as that of the second contact hole.