Heating apparatus, heat treatment apparatus, computer program and storage medium
First Claim
Patent Images
1. A heating apparatus for heating a target object, comprising:
- a plurality of heating light sources including LED (Light Emitting Diode) elements each for emitting heating light toward the object, the heating light having a wavelength in a range from 360 to 520 nm; and
a radiation thermometer that measures a temperature of the object, the radiation thermometer measuring a wavelength band different from a wavelength band of the light emitted from the LED elements.
2 Assignments
0 Petitions
Accused Products
Abstract
A heating apparatus for heating a target object W is provided with a plurality of heating light sources, including LED elements for applying heating light having a wavelength within a range from 360 to 520 nm to the object. Thus, a temperature of only the shallow surface of the object, such as a semiconductor wafer, is increased/reduced at a high speed in uniform temperature distribution, irrespective of the film type.
435 Citations
21 Claims
-
1. A heating apparatus for heating a target object, comprising:
-
a plurality of heating light sources including LED (Light Emitting Diode) elements each for emitting heating light toward the object, the heating light having a wavelength in a range from 360 to 520 nm; and a radiation thermometer that measures a temperature of the object, the radiation thermometer measuring a wavelength band different from a wavelength band of the light emitted from the LED elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A heat treatment apparatus for performing a specified heat treatment to a target object, comprising:
-
an exhaustible processing chamber having an open ceiling portion; a mounting table provided within the processing chamber for supporting the object on an upper surface thereof; a light transmission window for air-tightly covering the ceiling portion of the processing chamber; a gas introducing unit for introducing a required gas into the processing chamber; and a heating apparatus provided above the light transmission window for emitting heating light toward the object, wherein the heating apparatus includes; a heating light source having an LED element for emitting heating light toward the object, the heating light having a wavelength in a range from 360 to 520 nm, and a radiation thermometer that measures a temperature of the object, the radiation thermometer measuring a wavelength band different from a wavelength band of the light beams emitted from the LED elements. - View Dependent Claims (16, 17, 18, 19, 20, 21)
-
Specification