Surface defect data display and management system and a method of displaying and managing a surface defect data

• US 8,041,443 B2
• Filed: 05/21/2009
• Issued: 10/18/2011
• Est. Priority Date: 05/21/2008
• Status: Active Grant

• Current Assignee: Hitachi High-Tech Company Limited (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: Funakoshi, Tomohiro
• Primary Examiner(s): PATEL, RAMESH B
• Application Number:
  US12/469,762
• Publication Number:
  US 20090292387A1
• Time in Patent Office: 880 Days
• Field of Search: 700108-110, 702/180, 702/185, 356/237.3, 356/237.4, 356/239.3, 382/141, 382144-145, 382/149
• US Class Current: 700/110
• CPC Class Codes: G06F 3/0481 based on specific properties of the displayed interaction object or a metaphor-based environment, e.g. interaction with desktop elements like windows or icons, or assisted by a cursor's changing behaviour or appearance
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: Y10T 70/5637 With padlock
• CPC Class Codes: Y10T 70/5659 Dead bolt

Abstract

A surface defect data display and management system comprises a risk score calculation unit for calculating the magnitude of an influence a surface defect on a wafer detected by a wafer inspection system or review system has upon a reduction in the yield of a final product as a risk score of the surface defect based on a defect size of the surface defect on the wafer and a pattern concentration obtained from design data of a pattern figure nearby a location corresponding to the position of the surface defect, and a correlation graph and defect image display unit for preparing a correlation graph showing the correlation between the defect size and the risk score of each defect, displaying the prepared correlation graph on the display apparatus and displaying additionally a defect image list of one or more defects selected by using the correlation graph.

Claims

1. A surface defect data display and management system having a data processing apparatus, a storage and a display apparatus and adapted to display, on the display apparatus, surface defect data concerning a surface defect on a substrate detected by a surface defect inspection system for inspecting the surface defect on the substrate, wherein

said storage includes a defect data memory unit for storing, as the surface defect data, data containing position, feature factor, defect classification name and defect image of the surface defect detected by said surface defect inspection system, and a design data memory unit for storing design data representative of the shape of a pattern formed on the surface of said substrate, and wherein

said data processing apparatus comprises:

a risk score calculation unit for calculating, in respect of individual surface defects indicated by the surface defect data stored in said defect data memory unit, the magnitude of an influence the surface defect has upon a reduction in the yield of a final product manufactured from the substrate as a risk score of the surface defect on the basis of the feature factors and a pattern concentration obtained from design data of a pattern figure nearby a location position corresponding to the position of the surface defect;

a correlation graph display unit for preparing, in respect of the surface defects indicated by said surface defect data stored in said defect data memory unit, a correlation graph showing the correlation between the feature factors and the calculated risk scores of the individual surface defects in the form of positions of dots and displaying the prepared correlation graph on said display apparatus;

a surface defect selection unit for selecting one or more surface defects on the basis of dots indicative of the surface defects shown in said correlation graph; and

a surface defect image display unit for displaying in respect of one or more selected surface defects a list of surface defects on said display apparatus.

2. A surface defect data display and management system according to claim 1, wherein the feature factor of the surface defect is a defect size of the surface defect.

3. A surface defect data display and management system according to claim 1, wherein when the number of surface defects selected by said surface defect selection unit is one, said surface defect image display unit displays a defect image of said selected surface defect more largely than the defect image displayed in said list.

4. A surface defect data display and management system according to claim 1, wherein when the number of surface defects selected by said surface defect selection unit is one, said surface defect image display unit additionally displays a defect classification name of said selected surface defect on said display apparatus.

5. A surface defect data display and management system according to claim 1, wherein said surface defect image display unit additionally displays a list of defect classification names on said display apparatus and when receiving an input of a command to select one defect classification name from said list of defect classification names, displays dots representative of surface defects each having the selected defect classification name out of dots indicative of the surface defects shown in said correlation graph such that the dots to be displayed can be discriminated from the remaining dots and displays a list of defect images of said surface defects having said selected defect classification name on said display apparatus.

6. A surface defect data display and management system having a data processing apparatus, a storage and a display apparatus and adapted to display, on the display apparatus, surface defect data concerning a surface defect on a substrate detected by a surface defect inspection system for inspecting the surface defect on the substrate, wherein

said storage includes a defect data memory unit for storing, as the surface defect data, data containing position, feature factor, defect classification name and defect image of the surface defect detected by said surface defect inspection system, and a design data memory unit for storing design data representative of the shape of a pattern formed on the surface of said substrate, and wherein

said data processing apparatus comprises:

a risk score calculation unit for calculating, in respect of individual surface defects indicated by the surface defect data stored in said defect data memory unit, the magnitude of an influence the surface defect has upon a reduction in the yield of a final product manufactured from the substrate as a risk score of the surface defect on the basis of the feature factors and a pattern concentration obtained from design data of a pattern figure nearby a location corresponding to the position of the surface defect;

a histogram display unit for preparing, in respect of the surface defects indicated by said surface defect data stored in said defect data memory unit, a histogram of risk scores of said surface defects calculated by said risk score calculation unit and displaying the prepared histogram on said display apparatus;

a surface defect selection unit for selecting said surface defects by designating a range of the risk score on the basis of said displayed histogram; and

a surface defect image display unit for displaying in respect of one or more selected surface defects a list of defect images on said display apparatus.

7. A method of displaying and managing surface defect data in a surface defect data display and management system having a data processing apparatus, a storage and a display apparatus and adapted to display, on the display apparatus, surface defect data concerning a surface defect on a substrate detected by a surface defect inspection system for inspecting the surface defect on the substrate, wherein

said storage includes a defect data memory unit for storing, as the surface defect data, data containing position, feature factor, defect classification name and defect image of the surface defect detected by said surface defect inspection system and a design data memory unit for storing design data representative of the shape of a pattern formed on the surface of said substrate, and wherein

said data processing apparatus executes a method comprising the steps of:

(a) calculating, in respect of individual surface defects indicated by the surface defect data stored in said defect data memory unit, the magnitude of an influence the surface defect has upon a reduction in the yield of a final product manufactured from said substrate as a risk score of the surface defect on the basis of the feature factors and a pattern concentration obtained from design data of a pattern figure nearby a location corresponding to the position of the surface defect,

(b) preparing, in respect of the surface defects indicated by said surface defect data stored in said defect data memory unit, a correlation graph showing the correlation between the feature factors and the calculated risk scores of the individual surface defects in the form of positions of dots and displaying the prepared correlation graph on said display apparatus; and

(c) displaying, when one or more surface defects are selected on the basis of dots indicative of the surface defects shown in said correlation graph, a list of defect images of said one or more selected surface defects on said display apparatus.

8. A method of displaying and managing surface defect data according to claim 7, wherein said feature factor of a surface defect is a defect size of the surface defect.

9. A method of displaying and managing surface defect data according to claim 7, wherein when the number of surface defects selected on the basis of dots indicative of surface defects shown in said correlation graph is one, said data processing apparatus displays a defect image of said selected surface defect more largely than the defect image displayed in said list.

10. A method of displaying and managing surface defect data according to claim 7, wherein when the number of surface defects selected on the basis of dots indicative of surface defects shown in said correlation graph is one, said data processing apparatus additionally displays a defect classification name of said selected surface defect on said display apparatus.

11. A method of displaying and managing surface defect data according to claim 7, wherein when displaying a list of defect images of the surface defects on said display apparatus, said data processing apparatus additionally displays a list of defect classification names and when receiving an input of a command to select one defect classification name from said displayed defect classification name list, displays dots indicative of surface defects each having the selected defect classification name out of dots indicative of the surface defects shown in said correlation graph such that the dots to be displayed can be discriminated from the remaining dots and displays a list of defect images of said surface defects having said selected defect classification name on said display apparatus.