Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same
First Claim
1. A method for fabricating a micro-electro-mechanical system (MEMS) device, the method comprising the steps of:
- (a) preparing a substrate including an upper layer; and
(b) etching the upper layer both from the top side and from the bottom side to form beams at different levels, the beams including a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams forming vertical combdrive actuators, suspension beams, flexures, and a device mount wherein a thickness of the full-thickness beams is equal to that of the upper layer and wherein a thickness of the upper and lower beams is less than that of the upper layer.
0 Assignments
0 Petitions
Accused Products
Abstract
Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of operation for both axes. Actuators are connected to a device, or device mount by linkages that allow static two-axis rotation in addition to pistoning without the need for gimbals, or specialized isolation technologies. The device may be actuated by vertical comb-drive actuators, which are coupled by bi-axial flexures to a central micromirror or device mount. Devices may be fabricated by etching an upper layer both from the top side and from the bottom side to form beams at different levels. The beams include a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams That form vertical combdrive actuators, suspension beams, flexures, and a device mount.
-
Citations
18 Claims
-
1. A method for fabricating a micro-electro-mechanical system (MEMS) device, the method comprising the steps of:
(a) preparing a substrate including an upper layer; and
(b) etching the upper layer both from the top side and from the bottom side to form beams at different levels, the beams including a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams forming vertical combdrive actuators, suspension beams, flexures, and a device mount wherein a thickness of the full-thickness beams is equal to that of the upper layer and wherein a thickness of the upper and lower beams is less than that of the upper layer.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
Specification