Chip package

• US 8,044,475 B2
• Filed: 01/13/2009
• Issued: 10/25/2011
• Est. Priority Date: 06/06/2005
• Status: Expired due to Fees

• Current Assignee: Qualcomm, Inc.
• Original Assignee: Megica Corporation (Chipbond Technology Corporation)
• Inventors: Lin, Mou-Shiung, Lin, Shih-Hsiung, Lo, Hsin-Jung
• Primary Examiner(s): Smith; Zandra
• Assistant Examiner(s): Patton; Paul E
• Application Number:
  US12/353,250
• Publication Number:
  US 20090121302A1
• Time in Patent Office: 1,015 Days
• Field of Search: 257432-436, 257/680, 257/E23.009, 257/E23.01, 257/E23.011, 438/69, 438/70, 438/116, 438/121
• US Class Current: 257/432
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 27/14618 Containers
• CPC Class Codes: H01L 27/14683 Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof not peculiar thereto H01L21/00
• CPC Class Codes: H01L 27/14687 Wafer level processing
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 31/0203 Containers; Encapsulations , e.g. encapsulation of photodiodesfor photovoltaic devices H01L31/048; for organic photosensitive devices H10K30/80
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Abstract

A chip package includes a bump connecting said semiconductor chip and said circuitry component, wherein the semiconductor chip has a photosensitive area used to sense light. The chip package may include a ring-shaped protrusion connecting a transparent substrate and the semiconductor chip.

Claims

1. A chip package comprising:

a semiconductor chip comprising a CMOS device, a passivation layer over said CMOS device, wherein said passivation layer comprises a nitride layer, a metal pad having a contact point at a bottom of an opening in said passivation layer, wherein said opening is over said contact point, an optical filter over said passivation layer and said CMOS device, and a microlens over said optical filter, said passivation layer and said CMOS device;

a metal bump on said semiconductor chip, wherein said metal bump is connected to said contact point through said opening, wherein said metal bump comprises a titanium-containing layer, a gold seed layer on said titanium-containing layer and an electroplated gold layer having a thickness between 1 and 50 micrometers on said gold seed layer;

a transparent substrate over said semiconductor chip, wherein a cell is between said semiconductor chip and said transparent substrate and vertically over a photo-sensitive area of said semiconductor chip; and

a spacer between said semiconductor chip and said transparent substrate, wherein said spacer has a bottom end joining said semiconductor chip and a top end joining said transparent substrate, wherein said spacer is horizontally between said microlens and said metal bump.

2. The chip package of claim 1, wherein said metal bump is further on said contact point.

3. The chip package of claim 1, wherein said spacer comprises a polymer.

4. The chip package of claim 1 further comprising a flexible tape joining said metal bump, wherein said metal bump is further between said flexible tape and said semiconductor chip.

5. The chip package of claim 1, wherein said spacer comprises an electroplated gold layer having a thickness between 1 and 50 micrometers.

6. The chip package of claim 1, wherein said transparent substrate comprises a glass.

7. The chip package of claim 1, wherein said nitride layer has a thickness between 0.2 and 0.7 micrometers.

8. The chip package of claim 1, wherein said passivation layer further comprises an oxide layer under said nitride layer.

42. The chip package of claim 1, wherein said cell comprises an open space between said microlens and said transparent substrate.

43. The chip package of claim 1, wherein said cell is enclosed by said spacer.

44. The chip package of claim 1, wherein said cell is partially enclosed by said spacer.

9. A chip package comprising:

a semiconductor chip comprising a CMOS device, a passivation layer over said CMOS device, wherein said passivation layer comprises a nitride layer, a metal pad having a contact point at a bottom of an opening in said passivation layer, wherein said opening is over said contact point, an optical filter over said passivation layer and said CMOS device, and a microlens over said optical filter, said passivation layer and said CMOS device;

a metal bump on said semiconductor chip, wherein said metal bump is connected to said contact point through said opening, wherein said metal bump comprises an adhesion layer, a copper seed layer on said adhesion layer and an electroplated copper layer having a thickness between 1 and 100 micrometers on said copper seed layer;

a transparent substrate over said semiconductor chip, wherein a cell is between said semiconductor chip and said transparent substrate and vertically over a photo-sensitive area of said semiconductor chip; and

a spacer between said semiconductor chip and said transparent substrate, wherein said spacer has a bottom end joining said semiconductor chip and a top end joining said transparent substrate, wherein said spacer is horizontally between said microlens and said metal bump.

10. The chip package of claim 9, wherein said metal bump is further on said contact point.

11. The chip package of claim 9, wherein said spacer comprises a polymer.

12. The chip package of claim 9 further comprising a flexible tape joining said metal bump, wherein said metal bump is further between said flexible tape and said semiconductor chip.

13. The chip package of claim 9, wherein said transparent substrate comprises a glass.

14. The chip package of claim 9, wherein said nitride layer has a thickness between 0.2 and 0.7 micrometers.

15. The chip package of claim 9, wherein said passivation layer further comprises an oxide layer under said nitride layer.

45. The chip package of claim 9, wherein said cell comprises an open space between said microlens and said transparent substrate.

46. The chip package of claim 9, wherein said cell is enclosed by said spacer.

47. The chip package of claim 9, wherein said cell is partially enclosed by said spacer.

16. A chip package comprising:

a semiconductor chip comprising a CMOS device, a passivation layer over said CMOS device, wherein said passivation layer comprises a nitride layer, a metal pad having a contact point at a bottom of an opening in said passivation layer, wherein said opening is over said contact point, an optical filter over said passivation layer and said CMOS device, and a microlens over said optical filter, said passivation layer and said CMOS device;

a metal bump on said semiconductor chip, wherein said metal bump is connected to said contact point through said opening, wherein said metal bump comprises a copper layer, a nickel-containing layer on said copper layer and a tin-containing layer having a thickness between 1 and 300 micrometers on said nickel-containing layer;

a transparent substrate over said semiconductor chip, wherein a cell is between said semiconductor chip and said transparent substrate and vertically over a photo-sensitive area of said semiconductor chip; and

a spacer between said semiconductor chip and said transparent substrate, wherein said spacer has a bottom end joining said semiconductor chip and a top end joining said transparent substrate, wherein said spacer is horizontally between said microlens and said metal bump.

17. The chip package of claim 16, wherein said metal bump is further on said contact point.

18. The chip package of claim 16, wherein said spacer comprises a polymer.

19. The chip package of claim 16, wherein said transparent substrate comprises a glass.

20. The chip package of claim 16, wherein said nitride layer has a thickness between 0.2 and 0.7 micrometers.

48. The chip package of claim 16, wherein said cell comprises an open space between said microlens and said transparent substrate.

49. The chip package of claim 16, wherein said cell is enclosed by said spacer.

50. The chip package of claim 16, wherein said cell is partially enclosed by said spacer.

21. A chip package comprising:

a semiconductor chip comprising multiple CMOS devices, an insulating layer over said multiple CMOS devices, wherein said insulating layer comprises an oxide layer, an optical filter over said insulating layer and said multiple CMOS devices, and multiple microlenses over said optical filter, said insulating layer and said multiple CMOS devices;

a transparent substrate over said semiconductor chip, said multiple microlenses and said optical filter;

a spacer between said semiconductor chip and said transparent substrate, wherein said spacer has a bottom end joining said semiconductor chip and a top end joining said transparent substrate, wherein a cell is between said semiconductor chip and said transparent substrate and vertically over a photo-sensitive area of said semiconductor chip;

a metal interconnect connected to a metal pad of said semiconductor chip through an opening in said insulating layer, wherein said metal interconnect comprises a first adhesion layer, a copper-containing seed layer contacting said first adhesion layer, and a first electroplated copper layer having a thickness between 1 and 100 micrometers and contacting said copper-containing seed layer;

a circuit component joining said semiconductor chip; and

a tin-containing layer connected to said first electroplated copper layer, wherein said tin-containing layer is between said semiconductor chip and said circuit component, wherein said tin-containing layer has a thickness between 1 and 300 micrometers.

22. The chip package of claim 21, wherein said transparent substrate comprises a glass substrate.

23. The chip package of claim 21, wherein said first adhesion layer comprises titanium.

24. The chip package of claim 21, wherein said spacer comprises a polymer.

25. The chip package of claim 21, wherein said oxide layer has a thickness between 0.2 and 0.7 micrometers.

26. The chip package of claim 21, wherein said metal pad comprises a second electroplated copper layer and a second adhesion layer at a bottom and sidewall of said second electroplated copper layer.

27. The chip package of claim 21, wherein said metal pad comprises aluminum.

28. The chip package of claim 21, wherein said tin-containing layer comprises silver.

51. The chip package of claim 21, wherein said cell comprises an open space between said multiple microlenses and said transparent substrate.

52. The chip package of claim 21, wherein said cell is enclosed by said spacer.

53. The chip package of claim 21, wherein said cell is partially enclosed by said spacer.

29. A chip package comprising:

a semiconductor chip comprising multiple CMOS devices, an insulating layer over said multiple CMOS devices, a metal pad having a contact point under a first opening in said insulating layer, an optical filter over said insulating layer and said multiple CMOS devices, and multiple microlenses over said optical filter, said insulating layer and said multiple CMOS devices;

a transparent substrate over said semiconductor chip, said multiple microlenses and said optical filter, wherein said transparent substrate has a width less than that of said semiconductor chip;

a spacer between said semiconductor chip and said transparent substrate, wherein said spacer has a bottom end joining said semiconductor chip and a top end joining said transparent substrate, wherein a cell is between said semiconductor chip and said transparent substrate and vertically over a photo-sensitive area of said semiconductor chip;

a circuit component, wherein a second opening through said circuit component is vertically over said semiconductor chip; and

a metal bump over said contact point, wherein said metal bump has a bottom end joining said contact point and a top end joining said circuit component.

30. The chip package of claim 29, wherein said transparent substrate comprises a glass substrate.

31. The chip package of claim 29, wherein said spacer comprises a polymer.

32. The chip package of claim 29, wherein said insulating layer comprises an oxide layer.

33. The chip package of claim 32, wherein said oxide layer has a thickness between 0.2 and 0.7 micrometers.

34. The chip package of claim 29, wherein said metal pad comprises a copper layer.

35. The chip package of claim 29, wherein said metal pad comprises aluminum.

36. The chip package of claim 29, wherein said metal bump comprises gold.

37. The chip package of claim 29, wherein said metal bump comprises a tin-containing layer.

38. The chip package of claim 29, wherein said metal bump comprises copper.

39. The chip package of claim 29, wherein said cell comprises an open space between said multiple microlenses and said transparent substrate.

40. The chip package of claim 29, wherein said cell is enclosed by said spacer.

41. The chip package of claim 29, wherein said cell is partially enclosed by said spacer.