MEMS power inductor
First Claim
Patent Images
1. A semiconductor inductor comprising:
- a plurality of lower magnetic structures, each lower magnetic structure being spaced apart and electrically isolated from each other lower magnetic structure, and having a top surface;
a non-conductive structure, the non-conductive structure touching the top surface of each lower magnetic structure;
a conductive trace, the conductive trace touching the non-conductive structure, and lying directly over each of the lower magnetic structures; and
a plurality of upper magnetic structures, each upper magnetic structure being spaced apart and electrically isolated from each other upper magnetic structure, and touching the non-conductive structure, no portion of any upper magnetic structure touching any portion of a lower magnetic structure, no portion of any upper magnetic structure touching any portion of the conductive trace.
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Abstract
A scalable MEMS inductor is formed on the top surface of a semiconductor die. The MEMS inductor includes a plurality of magnetic lower laminations, a circular trace that lies over and spaced apart from the magnetic lower laminations, and a plurality of upper laminations that lie over and spaced apart from the circular trace.
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Citations
20 Claims
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1. A semiconductor inductor comprising:
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a plurality of lower magnetic structures, each lower magnetic structure being spaced apart and electrically isolated from each other lower magnetic structure, and having a top surface; a non-conductive structure, the non-conductive structure touching the top surface of each lower magnetic structure; a conductive trace, the conductive trace touching the non-conductive structure, and lying directly over each of the lower magnetic structures; and a plurality of upper magnetic structures, each upper magnetic structure being spaced apart and electrically isolated from each other upper magnetic structure, and touching the non-conductive structure, no portion of any upper magnetic structure touching any portion of a lower magnetic structure, no portion of any upper magnetic structure touching any portion of the conductive trace. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification