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Analog data-input device provided with a pressure sensor of a microelectromechanical type

  • US 8,044,929 B2
  • Filed: 03/30/2006
  • Issued: 10/25/2011
  • Est. Priority Date: 03/31/2005
  • Status: Active Grant
First Claim
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1. A data-input device, comprising:

  • a package having a chamber formed therein;

    a sensor including a semiconductor material body positioned inside the chamber, said body housing first and second sensitive elements, each having a microelectromechanical pressure sensor configured to detect pressure and to generate a respective electrical control signal corresponding to the detected pressure;

    a flexible membrane closing the chamber and delimiting a main surface of the package, the membrane being spaced apart from the sensor; and

    an elastomeric material positioned in the chamber between the membrane and the sensor, and configured to transmit actuating pressure, applied to an outer surface of the membrane, from the membrane to the sensor.

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