Method and device for identifying material boundaries of a test object

• US 8,045,806 B2
• Filed: 11/19/2007
• Issued: 10/25/2011
• Est. Priority Date: 05/17/2005
• Status: Active Grant

• Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Inventors: Lettenbauer, Hubert, Lotze, Andreas, Kunzmann, Steffen
• Primary Examiner(s): KOZIOL, STEPHEN R
• Application Number:
  US11/942,349
• Publication Number:
  US 20080089589A1
• Time in Patent Office: 1,436 Days
• Field of Search: 382/141, 382/154, 382/199, 382/285, 707/2, 707/104.1
• US Class Current: 382/190
• CPC Class Codes: G06T 2207/10081 Computed x-ray tomography [CT]
• CPC Class Codes: G06T 2207/20168 Radial search
• CPC Class Codes: G06T 2207/30164 Workpiece; Machine component
• CPC Class Codes: G06T 7/0006 using a design-rule based approach
• CPC Class Codes: G06T 7/12 Edge-based segmentation
• CPC Class Codes: G06V 10/46 Descriptors for shape, contour or point-related descriptors, e.g. scale invariant feature transform [SIFT] or bags of words [BoW]; Salient regional features colour feature extraction G06V10/56
• CPC Class Codes: G06V 10/98 Detection or correction of errors, e.g. by rescanning the pattern or by human intervention; Evaluation of the quality of the acquired patterns
• CPC Class Codes: G06V 20/64 Three-dimensional objects

Abstract

A method and a device determine material interfaces in a test object. The novel method generates three-dimensional image data of the test object or uses already existing three-dimensional image data of the test object. Image values of the image data are, or were, obtained by invasive radiation. An evaluation line for evaluating the image data relative to the test object is determined, a location of a material interface of the test object is determined by evaluating the image data of image values along the evaluation line so that the value of the first partial derivative of the image values in the direction of the evaluation line has a local maximum at the location of the material interface.

Claims

1. A method of identifying material boundaries of a test object, the method which comprises:

acquiring three-dimensional image data of the test object, wherein image values of the image data are obtained or have been obtained using invasive radiation;

defining an evaluation line for evaluating the image data in relation to the test object, the evaluation line extending through a point on an expected boundary surface of a material of the test object and having a direction, at the point, perpendicular to the expected boundary surface, wherein the point and the expected boundary surface are identified from information regarding a desired condition of the test object; and

evaluating the image values lying along the evaluation line to thereby determine a location of a material boundary in the test object, such that an amount of a first partial derivative of the image values in a direction of the evaluation line has a local maximum at the location of the material boundary.

2. The method according to claim 1, wherein the acquiring step comprises generating the three-dimensional image data of the test object or entering existing three-dimensional image data of the test object.

3. The method according to claim 1, which comprises, when obtaining the image values, partially compensating for differences between positionally adjacent image values.

4. The method according to claim 3, wherein the compensating step comprises compensating through digital filtering.

5. The method according to claim 1, which comprises partially compensating for, at least one of, differences in positionally adjacent image values that lie along the evaluation line, and differences in values derived from the image values that lie along the evaluation line, prior to or during the determination of the location of the material boundary.

6. The method according to claim 5, wherein the compensating step comprises compensating through digital filtering.

7. The method according to claim 1, wherein the step of evaluating the image values that lie along the evaluation line comprises weighting image values based upon a distance of the image values from the evaluation line.

8. The method according to claim 1, which comprises recognizing a location as a location of a material boundary only when the amount of the first partial derivative of the image values in the direction of the evaluation line exceeds a predetermined threshold value.

9. The method according to claim 1, which comprises recognizing a location as a location of a material boundary only when the amount of the first partial derivative of the image values in the direction of the evaluation line is greater than or equal to a predetermined threshold value.

10. A method of identifying material boundaries of a test object, the method which comprises:

determining at least a first location of a material boundary with the method according to claim 1;

identifying a plurality of additional locations on a boundary surface of the same material boundary, and thereby determining at least one of;

whether the evaluation line extends at the first location perpendicular to the boundary surface that is defined by at least the additional locations; and

a measurement of a deviation of the evaluation line from a surface normal.

11. A non-transitory, computer-readable data medium comprising a computer program having program code elements, which, when executed on a computer or a computer network, are configured to implement the method according to claim 1.

12. A non-transitory, computer-readable data storage medium having stored thereon the program code elements of the computer program according to claim 11.

13. A device for identifying material boundaries of a test object, the device comprising:

an interface for receiving three-dimensional image data of the test object, wherein image values of the image data have been obtained by way of invasive radiation;

a parametrization device for defining an evaluation line in relation to the test object, said the parametrization device defining an evaluation line extending through a point on an expected boundary surface of the material, and having a direction at the point perpendicular to an expected boundary surface, said parametrization device identifying the point and the expected boundary surface from information on a desired condition of the test object; and

an evaluation device connected to said interface and to said parametrization device, said evaluation device being configured to identify a location of a material boundary of the test object by evaluating image values lying along the evaluation line, so that an amount of a first partial derivative of the image values in the direction of the evaluation line has a local maximum at the location of the material boundary.