Silica-on-silicon waveguides and related fabrication methods
First Claim
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1. A silica waveguide, comprising:
- a first silica waveguide structure;
a second silica waveguide structure;
a silica separation strip separating the first silica waveguide structure from the second silica waveguide structure; and
a silicon pillar supporting the first silica waveguide structure, the second silica waveguide structure, and the silica separation strip,wherein the first silica waveguide structure and the second silica waveguide structure extend along a curved path, andwherein the curved path is a spiral path.
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Abstract
True time delay silica waveguides and related fabrication methods are disclosed. Also disclosed are true time delay silica waveguides comprising wedged silica structures.
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Citations
10 Claims
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1. A silica waveguide, comprising:
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a first silica waveguide structure; a second silica waveguide structure; a silica separation strip separating the first silica waveguide structure from the second silica waveguide structure; and a silicon pillar supporting the first silica waveguide structure, the second silica waveguide structure, and the silica separation strip, wherein the first silica waveguide structure and the second silica waveguide structure extend along a curved path, and wherein the curved path is a spiral path.
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2. A silica waveguide having a substantially curved shape, comprising:
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a first curved waveguide; a second curved waveguide; and a transition section connecting the first curved waveguide with the second curved waveguide, wherein the first curved waveguide, second curved waveguide, and transition section are wedged silica structures forming a non-resonant silica waveguide. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10)
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Specification