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Vertically integrated 3-axis MEMS accelerometer with electronics

  • US 8,047,075 B2
  • Filed: 06/21/2007
  • Issued: 11/01/2011
  • Est. Priority Date: 06/21/2007
  • Status: Active Grant
First Claim
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1. An accelerometer comprising:

  • an actuator substrate;

    a reference substrate; and

    at least two proof masses substantially on the actuator substrate, and suspended over the reference substrate, wherein the at least two proof masses are not electrically or mechanically coupled to each other, the at least two proof masses substantially constrained to move only along the same axis;

    the at least two proof masses having at least one stationary electrode to form a capacitance which changes with the acceleration induced in one direction.

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