Method for patterning a metallization layer by reducing resist strip induced damage of the dielectric material
First Claim
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1. A method, comprising:
- forming a stack of layers on a low-k dielectric layer formed above a substrate of a semiconductor device, said stack of layers comprising a hardmask layer formed above said low-k dielectric layer and a first cap layer formed on said hardmask layer;
forming a first opening in said stack of layers corresponding to a via opening to be formed in said low-k dielectric layer;
forming a first portion of said via opening in said low-k dielectric layer after forming said first opening using said hardmask layer as a first etch mask;
forming a trench etch mask by forming a second opening in said hardmask layer after forming said first portion of said via opening; and
performing an etching process to form a second portion of said via opening and to form a trench in said low-k dielectric layer on the basis of said trench etch mask, wherein said cap layer is removed from above said hardmask layer during said etching process.
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Abstract
By forming a hardmask layer in combination with one or more cap layers, undue exposure of a sensitive dielectric material to resist stripping etch ambients may be reduced and integrity of the hardmask may also be maintained so that the trench etch process may be performed with a high degree of etch selectivity during the patterning of openings in a metallization layer of a semiconductor device.
165 Citations
24 Claims
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1. A method, comprising:
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forming a stack of layers on a low-k dielectric layer formed above a substrate of a semiconductor device, said stack of layers comprising a hardmask layer formed above said low-k dielectric layer and a first cap layer formed on said hardmask layer; forming a first opening in said stack of layers corresponding to a via opening to be formed in said low-k dielectric layer; forming a first portion of said via opening in said low-k dielectric layer after forming said first opening using said hardmask layer as a first etch mask; forming a trench etch mask by forming a second opening in said hardmask layer after forming said first portion of said via opening; and performing an etching process to form a second portion of said via opening and to form a trench in said low-k dielectric layer on the basis of said trench etch mask, wherein said cap layer is removed from above said hardmask layer during said etching process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method, comprising:
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forming a hardmask layer above a dielectric material of a metallization layer of a semiconductor device, said hardmask layer comprising a first material layer formed above said dielectric material and a second material layer formed on said first material layer; forming a first opening in said hardmask layer, said first opening corresponding to a via opening to be formed in said dielectric material; forming a cap layer above said hardmask layer and in said first opening; after forming said cap layer, forming said via opening in said dielectric material after forming said first opening using at least said first material layer of said hardmask layer as an etch mask; forming a second opening in said hardmask layer after forming said via opening, said second opening corresponding to a trench to be formed in said dielectric material; and performing an etching process to form said trench in said dielectric material by using said first material layer as an etch mask, wherein said cap layer and said second material layer are removed from above said first material layer during said etching process. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of patterning a dielectric material of a metallization layer of a semiconductor device, the method comprising:
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forming a first hardmask layer above said dielectric material; forming a second hardmask layer on said first hardmask layer; forming a first opening in said first and second hardmask layers, said first opening corresponding to a via opening to be formed in said dielectric material; forming a second opening in said second hardmask layer and a first portion of said via opening in said dielectric material after forming said first opening, said second opening corresponding to a trench to be formed in said dielectric material; forming said second opening in said first hardmask layer; and performing an etching process to form said trench and to form a second portion of said via opening by using said first hardmask layer as an etch mask, wherein said second hardmask layer is removed from above said first hardmask layer during said etching process. - View Dependent Claims (22, 23, 24)
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Specification