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Charged particle beam irradiating apparatus

  • US 8,049,187 B2
  • Filed: 03/26/2009
  • Issued: 11/01/2011
  • Est. Priority Date: 03/28/2008
  • Status: Active Grant
First Claim
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1. A charged particle beam irradiating apparatus for irradiating a charged particle beam to an object, comprising:

  • a scanning electromagnet that scans the charged particle beam;

    a wobbler irradiation unit that irradiates the charged particle beam using a wobbler method;

    a scanning irradiation unit that irradiates the charged particle beam using a scanning method; and

    a control unit that controls the wobbler irradiation unit and the scanning irradiation unit,wherein the control unit operates one of the wobbler irradiation unit and the scanning irradiation unit, and controls the other irradiation unit to be in a withdrawn state so as not to hinder the irradiation of the charged particle beam.

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