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Self calibration devices for chemical and bio analytical trace detection systems

  • US 8,051,697 B2
  • Filed: 10/16/2008
  • Issued: 11/08/2011
  • Est. Priority Date: 10/17/2007
  • Status: Active Grant
First Claim
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1. A microelectromechanical device for calibration of a sensor, comprising:

  • (i) an array of micromachined MEMS structures for storage of calibrant molecules; and

    (ii) a calibrant releasing or interferent releasing structure operatively associated with the array.

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