Method of forming metal electrode of system in package
First Claim
1. A method comprising:
- providing a system-in-package including a multilayer semiconductor device having semiconductor devices stacked in a plurality of layers; and
thenforming a through hole extending through the plurality of layers; and
thenforming a combustible material having a high viscosity at a lowermost portion of the through hole; and
thenforming a through electrode by filling copper in the through hole.
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Accused Products
Abstract
A method for forming a metal electrode of a system in package of a system in package including a multilayer semiconductor device having semiconductor devices stacked in a plurality of layers. The method may include forming a through hole extending through the plurality of layers, forming a combustible material layer having high viscosity at a lower portion of the through hole in order to seal the lower portion thereof, and forming a through electrode by filling copper in the through hole. There is an effect of efficiently forming a through electrode having a large depth corresponding to the height of stacked semiconductor devices in the system in package. Filling copper in a through hole having a large depth-to-width ratio may be efficiently done by OSP coating, electrolysis copper plating, and electro Cu plating processes.
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Citations
19 Claims
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1. A method comprising:
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providing a system-in-package including a multilayer semiconductor device having semiconductor devices stacked in a plurality of layers; and
thenforming a through hole extending through the plurality of layers; and
thenforming a combustible material having a high viscosity at a lowermost portion of the through hole; and
thenforming a through electrode by filling copper in the through hole. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method comprising:
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providing a system-in-package including a multilayer semiconductor device having semiconductor devices stacked in a plurality of layers; and
thenforming a through hole extending through the plurality of layers; and
thensealing a lowermost end of the through hole; and
thenforming a through electrode composed of copper in the through hole, wherein sealing the lowermost end of the through hole comprises forming a layer composed of a combustible material on the lowermost end of the through hole. - View Dependent Claims (14, 15, 16)
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17. A method comprising:
providing a system-in-package including a multilayer semiconductor device having semiconductor devices stacked in a plurality of layers; and
thenforming a through hole extending through the plurality of layers; and
then forming a layer composed of an organic material on the lowermost surface of the multilayer semiconductor device and on a lowermost end of the through hole to seal the lowermost end of the through hole; and
thenforming a copper seed layer on the lowermost surface of the layer composed of an organic material, on inner walls of the through hole and on the uppermost surface of the multilayer semiconductor device; and
thenforming a copper layer on the copper seed layer; and
thenremoving a portion of the copper layer formed on the uppermost portion of the multilayer semiconductor device; and
thenremoving the layer composed of an organic material and the copper layer formed on the lowermost portion of the combustible material layer to thereby form a through electrode. - View Dependent Claims (18, 19)
Specification