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Method of performing mask-writer tuning and optimization

  • US 8,056,028 B2
  • Filed: 04/02/2009
  • Issued: 11/08/2011
  • Est. Priority Date: 04/14/2008
  • Status: Expired due to Fees
First Claim
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1. A method of tuning a first mask writer unit utilizing a reference mask writer unit, said first mask writer unit and said reference mask writer unit each having tunable parameters for controlling mask writing performance, said method comprising steps of:

  • defining a test pattern and a mask writing model;

    generating said test pattern utilizing said reference mask writer unit and measuring mask writing results;

    generating said test pattern utilizing said first mask writer unit and measuring mask writing results;

    calibrating said mask writing model utilizing said mask writing results corresponding to said reference mask writer unit, said calibrated mask writing model having a first set of parameter values;

    tuning said calibrated mask writing model utilizing said mask writing results corresponding to said first mask writer unit, said tuned calibrated mask writing model having a second set of parameter values; and

    adjusting said tunable parameters of said first mask writer unit based on a difference between said first set of parameter values and said second set of parameter values.

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