Method of performing mask-writer tuning and optimization
First Claim
1. A method of tuning a first mask writer unit utilizing a reference mask writer unit, said first mask writer unit and said reference mask writer unit each having tunable parameters for controlling mask writing performance, said method comprising steps of:
- defining a test pattern and a mask writing model;
generating said test pattern utilizing said reference mask writer unit and measuring mask writing results;
generating said test pattern utilizing said first mask writer unit and measuring mask writing results;
calibrating said mask writing model utilizing said mask writing results corresponding to said reference mask writer unit, said calibrated mask writing model having a first set of parameter values;
tuning said calibrated mask writing model utilizing said mask writing results corresponding to said first mask writer unit, said tuned calibrated mask writing model having a second set of parameter values; and
adjusting said tunable parameters of said first mask writer unit based on a difference between said first set of parameter values and said second set of parameter values.
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Accused Products
Abstract
A model-based tuning method for tuning a first mask writer unit utilizing a reference mask writer unit, each of which has tunable parameters for controlling mask writing performance. The method includes the steps of defining a test pattern and a mask writing model; generating the test pattern utilizing the reference mask writer unit and measuring the mask writing results; generating the test pattern utilizing the first mask writer unit and measuring the mask writing results; calibrating the mask writing model utilizing the mask writing results corresponding to the reference mask writer unit, where the calibrated mask writing model has a first set of parameter values; tuning the calibrated mask writing model utilizing the mask writing results corresponding to the first mask writer unit, where the tuned calibrated model has a second set of parameter values; and adjusting the parameters of the first mask writer unit based on a difference between the first set of parameter values and the second set of parameter values.
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Citations
10 Claims
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1. A method of tuning a first mask writer unit utilizing a reference mask writer unit, said first mask writer unit and said reference mask writer unit each having tunable parameters for controlling mask writing performance, said method comprising steps of:
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defining a test pattern and a mask writing model; generating said test pattern utilizing said reference mask writer unit and measuring mask writing results; generating said test pattern utilizing said first mask writer unit and measuring mask writing results; calibrating said mask writing model utilizing said mask writing results corresponding to said reference mask writer unit, said calibrated mask writing model having a first set of parameter values; tuning said calibrated mask writing model utilizing said mask writing results corresponding to said first mask writer unit, said tuned calibrated mask writing model having a second set of parameter values; and adjusting said tunable parameters of said first mask writer unit based on a difference between said first set of parameter values and said second set of parameter values. - View Dependent Claims (2, 3, 4, 5)
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6. A method of tuning a mask writer unit utilizing a mask writing model, said mask writer unit and said mask writing model each having tunable parameters for controlling mask writing performance, said method comprising steps of:
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defining a test pattern; generating said test pattern utilizing said mask writer unit and measuring mask writing results, said mask writer unit having a first set of parameter values; tuning said mask writing model utilizing said mask writing results corresponding to said mask writer unit, said tuned mask writing model having a second set of parameter values; and adjusting said tunable parameters of said mask writer unit based on a difference between said first set of parameter values and said second set of parameter values. - View Dependent Claims (7, 8, 9, 10)
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Specification