Method for producing semiconductor components and thin-film semiconductor component
First Claim
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1. A method for producing semiconductor components, comprising the steps of:
- forming a layer composite containing a semiconductor material on a growth substrate;
applying a flexible carrier layer to the layer composite;
curing the flexible carrier layer to form a self-supporting carrier layer;
stripping away the growth substrate; and
applying a flexible covering layer comprising a film on a side of the layer composite remote from the flexible covering layer;
wherein the flexible covering layer and the flexible carrier layer remain in the produced semiconductor component.
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Abstract
The invention relates to a method for producing semiconductor components, wherein a layer composite (6) containing a semiconductor material is formed on a growth substrate (1), a flexible carrier layer is applied to the layer composite (6), the flexible carrier layer is cured to form a self-supporting carrier layer (2), and the growth substrate (1) is stripped away. As an alternative, the carrier layer (2) may have a base layer (2b) and an adhesion layer (2a) adhering on the layer composite.
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Citations
38 Claims
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1. A method for producing semiconductor components, comprising the steps of:
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forming a layer composite containing a semiconductor material on a growth substrate; applying a flexible carrier layer to the layer composite; curing the flexible carrier layer to form a self-supporting carrier layer; stripping away the growth substrate; and applying a flexible covering layer comprising a film on a side of the layer composite remote from the flexible covering layer; wherein the flexible covering layer and the flexible carrier layer remain in the produced semiconductor component. - View Dependent Claims (10, 11, 12, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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2. A method for producing semiconductor components, comprising the steps of:
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forming a layer composite containing a semiconductor material on a growth substrate; applying a self-supporting carrier layer to the layer composite, the carrier layer having a base layer and an adhesion layer, which faces the layer composite and which adheres on the layer composite; stripping away the growth substrate; and applying a flexible covering layer comprising a film on a side of the layer composite remote from the flexible covering layer; wherein the flexible covering layer and the flexible carrier layer remain in the produced semiconductor component. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification