Plasma immersion ion implantation reactor having multiple ion shower grids

• US 8,058,156 B2
• Filed: 07/20/2004
• Issued: 11/15/2011
• Est. Priority Date: 07/20/2004
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Ramaswamy, Kartik, Tanaka, Tsutomu, Hanawa, Hiroji, Collins, Kenneth S., Nguyen, Andrew, Al-Bayati, Amir
• Primary Examiner(s): Stark; Jarrett J
• Application Number:
  US10/895,784
• Publication Number:
  US 20060019039A1
• Time in Patent Office: 2,674 Days
• Field of Search: 438/514, 438/516, 257/E21.057
• US Class Current: 438/514
• CPC Class Codes: C23C 14/046 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
• CPC Class Codes: C23C 14/48 Ion implantation
• CPC Class Codes: C23C 16/045 Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32412 Plasma immersion ion implantation

Abstract

A plasma immersion ion implantation process for implanting a selected species at a desired ion implantation depth profile in a workpiece is carried out in a reactor chamber having a set of plural parallel ion shower grids that divide the chamber into an upper ion generation region and a lower process region, each of the ion shower grids having plural orifices in mutual registration from grid to grid, the plural orifices oriented in a non-parallel direction relative to a surface plane of the respective ion shower grid. The process includes placing a workpiece in the process region, the workpiece having a workpiece surface generally facing the surface plane of the closest one of the plural ion shower grids, and furnishing the selected species into the ion generation region. The process further includes evacuating the process region, and applying plasma source power to generate a plasma of the selected species in the ion generation region. The process also includes applying successive grid potentials to successive ones of the grids and applying a bias potential to the workpiece. The combination of the grid and bias potentials corresponds to the desired ion implantation depth profile in the workpiece.

Claims

1. A plasma immersion ion implantation process for implanting a selected implantation species at a desired ion implantation depth profile of said implantation species in a workpiece, comprising:

providing a reactor chamber and a set of plural parallel ion shower grids that divide said chamber into an upper ion generation region and a lower process region, each of said ion shower grids having plural orifices in mutual registration from grid to grid, said plural orifices oriented in a non-parallel direction relative to a surface plane of the respective ion shower grid;

placing a workpiece in said process region;

furnishing a process gas comprising said selected implantation species into said ion generation region;

evacuating said process region;

applying plasma source power to generate a plasma comprising ions of said selected implantation species in said ion generation region;

applying successive grid potentials to successive ones of said grids; and

establishing said desired ion implantation depth profile by applying to said workpiece a bias potential that corresponds to said desired ion implantation depth profile.

2. The process of claim 1 wherein said successive grid potentials are sufficient to create a flux of ions through at least some of said plural grids.

3. The process of claim 1 wherein said providing a set of plural parallel ion shower grid comprises providing at least three such grids.

4. The process of claim 2 further comprising transforming said flux of ions at a bottom one of said grids to a flux of neutrals that is incident on said workpiece, whereby said bottom one of said grids comprises a neutralization grid.

5. The process of claim 1 wherein the step of evacuating creates a sufficiently low pressure in said process region to keep an ion-neutral mean collision distance in said process region in excess of a distance between said workpiece and the lowermost ion shower grid.

6. The process of claim 1 wherein the step of applying successive attractive grid potentials to said successive ones of said grids comprises applying said attractive grid potentials to at least alternate ones of said grids and applying small repulsive potentials to remaining ones of said grids to focus ions toward centers of said orifices.

7. The process of claim 6 wherein a net potential difference across said plural grids is attractive to an ion flux passing from the uppermost one of said grids to the lowermost one of said grids.

8. The process of claim 2 wherein said flux of ions is collimated to a limited angular trajectory distribution that is sufficiently narrow to collimate said flux of ions into an opening in a surface of said workpiece having a minimum opening size on the order of about 65 nm or less and an aspect ratio of 5.

9. The process of claim 1 further comprising controlling the potential of the plasma in said ion generation region by controlling the potential of the uppermost one of said grids.

10. The process of claim 1 further comprising controlling the temperature of said ion shower grid.

11. The process of claim 10 wherein the step of controlling the temperature of said ion shower grid comprises pumping a thermal control fluid through fluid flow passages thermally coupled to said ion shower grid and controlling the temperature of said thermal control fluid.

12. The process of claim 1 further comprising providing neutralization electrons in the vicinity of said workpiece.

13. The process of claim 12 wherein the step of providing neutralization electrons comprises establishing a magnetic field near said workpiece having sufficient magnetic flux to trap electrons near said workpiece surface.

14. The process of claim 12 wherein the step of providing neutralization electrons comprises generating a flow of electrons from an electron gun toward said workpiece surface.

15. The process of claim 12 wherein the step of providing neutralization electrons comprises injecting an electron-donor gas into said process region and near said workpiece.

16. The process of claim 15 wherein said electron-donor gas comprises Zenon.

17. The process of claim 12 wherein the step of providing neutralization electrons comprises providing a plasma from an external plasma source into said process region.

18. The process of claim 1 wherein the step of applying plasma source power comprises capacitively coupling plasma source power into said ion generation region.

19. The process of claim 18 wherein the step of capacitively coupling plasma source power comprises applying RF power from an RF generator between a ceiling of said reactor and one of (a) the uppermost one of said grids, (b) a side wall of said ion generation region of said reactor.

20. The process of claim 18 wherein it is the bias potential that determines the implantation depth profile.

21. The process of claim 20 wherein said bias potential includes an RF voltage, said process further comprising controlling ion energy near the workpiece surface by controlling the frequency of said RF voltage.

22. The process of claim 18 wherein said plasma source power comprises RF power and each of said grid potentials comprises at least one of:

(a) a pulsed D.C. voltage, (b) an RF voltage, (c) a D.C. voltage, (d) a pulsed RF voltage.

23. The process of claim 22 wherein each of said grid potentials comprises a mixture of at least two of (a) a pulsed D.C. voltage, (b) an RF voltage, (c) a D.C. voltage, (d) a pulsed RF voltage.

24. The process of claim 1 wherein the step of applying plasma source power comprises inductively coupling plasma source power into said ion generation region.

25. The process of claim 24 wherein it is the bias potential on the workpiece that determines the implantation depth profile.

26. The process of claim 24 wherein said bias potential includes an RF voltage, said process further comprising controlling ion energy near the workpiece surface by controlling the frequency of said RF voltage.

27. The process of claim 24 wherein said plasma source power comprises RF power and said grid potentials comprise at least one of:

(a) pulsed D.C. voltages, (b) RF voltages, (c) D.C. voltages, (d) a pulsed RF voltage.

28. The process of claim 27 wherein each of said grid potentials comprises a mixture of at least two of:

(a) a pulsed D.C. voltage, (b) an RF voltage, (c) a D.C. voltage, (d) a pulsed RF voltage.

29. The process of claim 1 wherein the step of applying plasma source power comprises coupling microwave plasma source power into said ion generation region.

30. The process of claim 29 wherein it is the bias potential on the workpiece that determines the implantation depth profile.

31. The process of claim 30 wherein said bias potential includes an RF voltage, said process further comprising controlling ion energy near the workpiece surface by controlling the frequency of said RF voltage.

32. The process of claim 29 wherein said grid potentials comprise at least one of:

(a) pulsed D.C. voltages, (b) RF voltages, (c) D.C. voltages, (d) pulsed RF voltages.

33. The process of claim 29 wherein said each of said grid potentials comprises a mixture of at least two of (a) a pulsed D.C. voltage, (b) an RF voltage, (c) a D.C. voltage, (d) a pulsed RF voltage.

34. The process of claim 1 wherein the step of applying plasma source power comprises generating a torroidal plasma current in said ion generation region through an external reentrant conduit coupled across said ion generation region and coupling the RF plasma source power into the external reentrant conduit.

35. The process of claim 34 wherein it is the RF bias potential that controls the implant depth profile.

36. The process of claim 35 wherein said bias potential includes an RF voltage, said process further comprising controlling ion energy near the workpiece surface by controlling the frequency of said RF voltage.

37. The process of claim 34 wherein said plasma source power comprises RF power and said grid potentials comprise at least one of:

(a) pulsed D.C. voltages, (b) RF voltages, (c) D.C. voltages, (d) pulsed RF voltages.

38. The process of claim 37 wherein each of said grid potentials comprises a mixture of at least two of (a) a pulsed D.C. voltage, (b) an RF voltage, (c) a D.C. voltage, (d) a pulsed RF voltage.

39. The process of claim 20, wherein said bias potential includes an RF voltage, said process further comprising controlling ion energy near the workpiece surface by controlling the voltage of said RF voltage.

40. The process of claim 25, wherein said bias potential includes an RF voltage, said process further comprising controlling ion energy near the workpiece surface by controlling the voltage of said RF voltage.

41. The process of claim 30, wherein said bias potential includes an RF voltage, said process further comprising controlling ion energy near the workpiece surface by controlling the voltage of said RF voltage.

42. The process of claim 35, wherein said bias potential includes an RF voltage, said process further comprising controlling ion energy near the workpiece surface by controlling the voltage of said RF voltage.

43. The process of claim 1 further the following steps carried out prior to the step of placing a workpiece in said process region:

depositing a layer of a process-compatible material on reactor chamber interior surfaces.

44. The process of claim 43 wherein the step of depositing a layer of a process-compatible material comprises:

introducing a process gas comprising a precursor of said process-compatible material into said ion generation region;

applying plasma source power into said ion generation region.

45. The process of claim 44 further comprising applying an ion extraction potential to at least one of said grids.

46. The process of claim 43 wherein the step of depositing a layer of a process-compatible material comprises furnishing into at least one of said ion generation and process regions ions or radicals of said process-compatible material from a plasma source external of said chamber.

47. The process of claim 1 further comprising the following steps carried out after the step of depositing a layer of a process-compatible material:

removing said workpiece from said chamber;

cleaning the reactor chamber interior surfaces.

48. The process of claim 47 wherein the step of cleaning the reactor interior chamber surfaces comprises:

introducing a process gas comprising an etchant species into said ion generation region;

applying plasma source power into said ion generation region.

49. The process of claim 48 further comprising applying an ion extraction potential to at least one of said grids.

50. The process of claim 47 wherein the step of cleaning the reactor interior surfaces comprises:

furnishing into at least one of said ion generation and process regions ions or radicals of an etchant species.

51. The process of claim 1 further comprising maintaining said workpiece and the grid nearest said workpiece at generally the same electrical potential.

52. The process of claim 1 further comprising:

traversing said workpiece and said grids relative to one another so as to scan an ion beam from said grids across said workpiece.

53. The process of claim 52 wherein said workpiece has a diameter exceeding that of said grids.

54. The process of claim 1 further comprising tilting said workpiece relative to said grids.

55. The process of claim 1 further comprising thermally coupling said workpiece to a workpiece support pedestal and thermally cooling or heating said workpiece support pedestal.

56. The process of claim 55 further comprising electrostatically chucking said workpiece on said workpiece support pedestal.

57. The process of claim 22 further comprising maintaining said workpiece and the grid nearest said workpiece at generally the same electrical potential.

58. The process of claim 27 further comprising maintaining said workpiece and the grid nearest said workpiece at generally the same electrical potential.

59. The process of claim 32 further comprising maintaining said workpiece and the grid nearest said workpiece at generally the same electrical potential.

60. The process of claim 37 further comprising maintaining said workpiece and the grid nearest said workpiece at generally the same electrical potential.

61. The process of claim 1 wherein said bias potential is different from any of said grid potentials.

62. The process of claim 61 further comprising maintaining said plasma at a reference potential and wherein the steps of applying said grid potentials and said bias potentials comprises applying ion-attractive voltages of successively greater magnitude to successive ones of said grids and applying the greatest ion-attractive voltage to said workpiece.

63. The process of claim 62 wherein said reference potential is at least nearly equal to RF ground and said ion-attractive voltages are negative voltages.

64. The method of claim 1 wherein said workpiece comprises a semiconductor material, and said selected species is a dopant impurity that promotes one of a p-type or n-type conductivity in said semiconductor material, and wherein said desired depth profile corresponds to a desired p-n junction depth.

65. The method of claim 64 wherein said selected species comprises a chemical combination of said dopant impurity and another element.

66. The method of claim 65 wherein said selected species comprises a fluoride of said dopant impurity.

67. The method of claim 65 wherein said selected species comprises a hydride of said dopant impurity.

68. The method of claim 65 wherein said selected species further comprises a co-implant ion bombardment element which removes from a top surface of said workpiece a material that tends to accumulate during implantation of said dopant impurity.

69. The method of claim 1 wherein said workpiece comprises a semiconductor crystal which is to be implanted with a dopant impurity element, and wherein said selected species comprises a pre-implant ion bombardment species that creates damage in said semiconductor crystal.

70. The method of claim 1 wherein said workpiece comprises a dielectric thin film, and wherein said selected species comprises a surface-enhancement species which enhances a characteristic of said dielectric thin film layer upon implantation and substitution.

71. The method of claim 70 wherein said characteristic is the electrical behavior of said dielectric thin film.

72. The method of claim 70 wherein said dielectric thin film comprises an oxide of a semiconductor element, and said selected species comprises a non-oxygen element to be substituted for oxygen atoms in said dielectric thin film.

73. The method of claim 1 wherein the step of furnishing said selected species is preceded by:

introducing a passivation gas containing a passivation layer-forming species;

generating from said passivation gas a plasma;

attracting passivation layer-forming species from said plasma to said workpiece by applying a bias voltage to said workpiece support, to form a passivation layer on said workpiece.

74. The method of claim 73 wherein said passivation gas comprises one of:

(a) a hydride, (b) a fluoride, (c) an oxide of a semiconductor element.

75. The method of claim 1 wherein the step of placing said workpiece on said workpiece support is preceded by:

introducing a passivation process gas containing passivation-forming chemical species;

generating from said passivation gas a plasma;

attracting passivation layer-forming species from said plasma to interior surfaces of said reactor chamber, to form a passivation layer on said interior surfaces.

76. The method of claim 75 wherein said passivation gas comprises one of a hydride, a fluoride or an oxide of a semiconductor element.

77. The method of claim 75 wherein said passivation gas comprises a chemical species containing carbon and fluorine.

78. The method of claim 75 wherein the step of generating a plasma from said passivation gas is followed by:

removing said workpiece from said reactor chamber;

introducing a passivation layer-removing gas into said chamber;

generating a plasma from said passivation layer-removing gas, so as to remove said passivation layer from said interior surfaces of said chamber.

79. The method of claim 78 further comprising heating said interior surfaces of said reactor chamber during the removal of said passivation layer.

80. The method of claim 79 wherein said passivation layer-removing gas comprises a fluorine-containing gas.

81. The method of claim 1 wherein the step of generating a plasma is followed by:

heating said workpiece to a temperature sufficiently high to cause atoms of said selected species implanted in said workpiece to be substituted into atomic sites in a crystal lattice of said workpiece.

82. The method of claim 81 wherein said workpiece is masked by a photolithographic layer defining a pattern of ion implantation, and wherein the step of heating said surface is preceded by:

removing said photolithographic layer.

83. The method of claim 82 wherein the step of removing said photolithographic layer is carried out in a pyrolization chamber.

84. The method of claim 81 wherein the step of heating said workpiece is carried out after removing said workpiece from said reactor chamber and placing it in an anneal chamber.

85. The method of claim 68 wherein said selected species is a hydride of said dopant species and said ion bombardment element comprises one of Helium, Hydrogen, a fluoride of a semiconductor element, or SiF4.

86. The method of claim 64 wherein said semiconductor material is silicon and said dopant impurity is boron.

87. The method of claim 64 wherein said semiconductor element is silicon and said dopant impurity is phosphorus.

88. The method of claim 64 wherein said semiconductor element comprises one of silicon or germanium.

89. The method of claim 1 wherein:

said workpiece comprises plural dielectric gates formed over an underlying layer having horizontal and non-horizontal surfaces;

the step of applying a bias potential comprises selecting a bias voltage level promotive of a sufficiently collisional plasma sheath over said workpiece to produce a significant fraction of ions impacting said workpiece at trajectories other than orthogonal to said workpiece whereby to implant ions in said horizontal and non-horizontal surfaces of said workpiece.

90. The method of claim 64 wherein said workpiece comprises a crystal lattice and wherein the step of generating a plasma is preceded by:

introducing into said chamber an amorphizing gas comprising an ion bombardment species;

generating a plasma from said amorphizing gas;

applying a bias voltage to said workpiece support to attract ions of said ion bombardment species toward said workpiece whereby said ions cause damage in said crystal lattice.

91. The method of claim 90 wherein said ion bombardment species comprises a semiconductive species.

92. The method of claim 91 wherein said ion bombardment species comprises one of silicon or germanium.

93. The method of claim 65 wherein said selected species further comprises an ion bombardment species for co-implantation with said dopant impurity in said workpiece.

94. The method of claim 93 wherein ions of said ion bombardment species are implanted in said workpiece to cause crystal lattice damage for amorphizing said workpiece during implantation of said dopant impurity in said workpiece.

95. The method of claim 94 wherein said ion bombardment species comprises a semiconductor species.

96. The method of claim 95 wherein said semiconductor species comprises one of silicon or germanium.

97. The method of claim 1 further comprising pulse modulating said bias potential.

98. The method of claim 97 further comprising pulse modulating said source power.

99. The method of claim 98 further comprising maintaining a relation between the pulse modulating of said bias potential and the pulse modulating of said source power that is one of:

(a) push-pull;

(b) in-synchronism;

(c) symmetrical;

(d) non-symmetrical.

100. The method of claim 1 wherein the step of applying said bias potential comprises applying a single burst of said bias potential to said workpiece.

101. The method of claim 100 wherein said single burst has a duration corresponding to a desired implant dosage.

102. The method of claim 1 further comprising distributing ion flux across said workpiece by translating said grid and said workpiece relative to one another in a direction parallel to the plane of said workpiece.

103. The process of claim 1 further comprising the following steps carried out after the implanting of said selected species at said desired depth:

removing said workpiece from said chamber;

cleaning the reactor chamber interior surfaces.

104. The process of claim 103 wherein the step of cleaning the reactor interior chamber surfaces comprises:

introducing a process gas comprising an etchant species into said ion generation region;

applying plasma source power into said ion generation region and applying an ion extraction potential to said grid.

105. The process of claim 103 wherein the step of cleaning the reactor interior surfaces comprises:

furnishing into at least one of said ion generation and process regions ions or radicals of an etchant species.

106. The process of claim 1 wherein the step of furnishing said selected species comprises injecting a process gas containing said selected species into said ion generation region.

107. The process of claim 106 wherein said selected species is one of (a) molecular, (b) atomic.

108. The process of claim 106 wherein said process gas comprises one of:

(a) a gaseous metal compound;

(b) a metal organic compound.

109. The process of claim 1 wherein the step of furnishing said selected species comprises:

providing a sputter target of a material comprising said selected species;

sputtering said sputter target.

110. The process of claim 109 wherein said target comprises one of:

(a) a metal;

(b) a dielectric;

(c) a semiconductor.

111. The process of claim 1 wherein the step of furnishing said selected species comprises producing a metal vapor in said ion generation region.

112. The process of claim 1 wherein the step of applying said grid potentials comprises applying an ion extraction voltage to at least a first one of said grids relative to a potential of one (a) a plasma in said ion generation region, (b) a chamber surface, (c) said bias potential.

113. The process of claim 112 wherein said bias potential and said extraction voltage are at least nearly equal, and wherein said extraction voltage is applied relative to one of (a) a plasma in said ion generation region, (b) a chamber surface.

114. The process of claim 112 wherein said bias potential differs from said ion extraction voltage and affects the kinetic energy of said flux of ions.

115. The process of claim 112 further comprising applying an ion deceleration potential to a second one of said grids.

116. The process of claim 115 wherein said deceleration potential and said bias potential control the kinetic energy of said flux of ions to said implantation depth profile.

117. The process of claim 115 wherein said ion extraction potential is sufficiently great to extract ions through said first grid at a high current and at a kinetic energy greater than that required for said implantation depth profile.

118. The process of claim 112 further comprising applying a neutralization potential to a third one of said grids so as to produce a flux of neutrals from said third grid to said workpiece.