Micro-emitter array based full-color micro-display

• US 8,058,663 B2
• Filed: 09/26/2008
• Issued: 11/15/2011
• Est. Priority Date: 09/26/2007
• Status: Active Grant

• Current Assignee: III-N Technology, Inc.
• Original Assignee: III-N Technology, Inc.
• Inventors: Li, Jing, Jiang, Hongxing, Lin, Jingyu, Fan, Zhaoyang
• Primary Examiner(s): Tran; Tan N
• Application Number:
  US12/238,642
• Publication Number:
  US 20090078955A1
• Time in Patent Office: 1,145 Days
• Field of Search: 257/88, 257/89, 257/91, 257/98, 257/103
• US Class Current: 257/98
• CPC Class Codes: H01L 27/15 including semiconductor components having potential barriers, specially adapted for light emission
• CPC Class Codes: H01L 27/156 two-dimensional arrays

Abstract

Disclosed is a semiconductor micro-emitter array for use in a full-color microdisplay. Each pixel includes three vertically-stacked red, green, and blue micro-emitters which minimizes pixel size. The microdisplay may be exclusively based on Group III-nitride semiconductors, with differing indium concentrations in three respective InGaN/GaN active regions for emitting the three RGB colors. Alternatively the microdisplay may be based on hybrid integration of InGaN based III-nitride semiconductors for blue and green emissions, and AlGaInP based (e.g., Group III-V) semiconductors for red emissions.

Claims

1. A pixel for use in a multicolor illumination device, said pixel comprising:

a red emitter;

a green emitter; and

a blue emitter for generating a blue light emission;

said red, green, and blue emitters being substantially vertically stacked one on top of the other onto a substrate, and

wherein both of said green and blue emitters are caused to be transparent relative to a red light emission from said red emitter, and said blue emitter is caused to be transparent relative to a green light emission from said green emitter;

wherein said substrate is transparent to all of said red, green, and blue light emissions; and

wherein said pixel structure comprises;

(i) a buffer layer deposited on said substrate;

(ii) a first n-GaN layer deposited above said buffer layer;

(iii) a first InGaN/GaN multi-quantum well (MQW) active region deposited above said first n-GaN layer, said first InGaN/GaN MQW active region being adapted to generate said blue emissions;

(iv) a first p-GaN layer deposited above said first InGaN/GaN MQW active region;

(v) an at least semi-insulative layer deposited above said first p-GaN layer;

(vi) a second p-GaN layer deposited above said at least semi-insulative layer;

(vii) a second InGaN/GaN MQW active region deposited above said second p-GaN layer, said second InGaN/GaN MQW active region adapted generate said green emissions;

(viii) a second n-GaN layer deposited above said second InGaN/GaN MQW active region;

(ix) a third InGaN/GaN MQW active region deposited above said second n-GaN layer, said third InGaN/GaN MQW active region adapted to generate said red emissions; and

(x) a third p-GaN layer deposited above said third InGaN/GaN MQW active region.

2. The device of claim 1 wherein said InGaN-based structures are separated from said AlGaInP-based structures by a red-light-transparent p⁺-GaAs current-spreading layer atop a red-light-transparent SiO₂ layer.

3. A pixel for use in a multicolor illumination device, said pixel comprising:

a red emitter;

a green emitter; and

a blue emitter for generating a blue light emission;

said red, green, and blue emitters being substantially vertically stacked one on top of the other onto a substrate, and wherein both of said green and blue emitters are caused to be transparent relative to a red light emission from said red emitter, and said blue emitter is caused to be transparent relative to a green light emission from said green emitter;

wherein said pixel is comprised of a hybrid integration of Group III-nitride semiconductors and Group III-V semiconductors;

wherein said green, and blue emitters are comprised of InGaN-based structures and said red emitter is comprised of AlGaInP-based structures;

wherein said substrate is transparent to said blue, green, and red emissions, and said pixel has structures comprising;

a buffer layer on said substrate;

a first n-GaN layer above said buffer layer;

a blue emission layer above said first n-GaN layer;

a first p-GaN layer above said blue emission layer;

a green emission layer above said first p-GaN layer;

a second n-GaN layer above said green emission layer;

an electrically-isolating layer above said second n-GaN layer, said electrically-isolating layer insulating between said InGaN-based structures and said AlGaInP-based structures;

a current-spreading layer above said electrically-isolating layer;

a p-AlGaInP layer above said current-spreading layer;

a red-emission layer above said p-AlGaInP layer; and

an n-AlGaInP layer above said red-emission layer.

4. The device of claim 3 comprising:

a common anode for each of said blue, green, and red emitters established by electrically-connecting and grounding said current-spreading layer and said first p-GaN layer;

a first independent cathode electrically connected with said first n-GaN layer for the purpose of enabling said blue emitter to be selectively activated by administering a voltage to said first independent cathode;

a second independent cathode electrically connected with said second n-GaN layer for the purpose of enabling said green emitter to be selectively activated by administering a voltage to said second independent cathode;

a third independent cathode electrically connected with said n-AlGaInP layer for the purpose of enabling said red emitter to be selectively activated by administering a voltage to said third independent cathode.

5. A pixel for use in a multicolor illumination device, said pixel comprising:

a red emitter;

a green emitter; and

a blue emitter for generating a blue light emission;

said red, green, and blue emitters being substantially vertically stacked one on top of the other onto a substrate, and wherein both of said green and blue emitters are caused to be transparent relative to a red light emission from said red emitter, and said blue emitter is caused to be transparent relative to a green light emission from said green emitter;

wherein said pixel is comprised of a hybrid integration of Group III-nitride semiconductors and Group III-V semiconductors;

wherein said green, and blue emitters are comprised of InGaN-based structures and said red emitter is comprised of AlGaInP-based structures;

the device further comprising;

an electrical connection made between a first n-contact associated with said AlGaInP-based structures and a second n-contact, said second n-contact being deposited on an n-GaN layer which is deposited between a green emissive layer and a blue emissive layer;

said n-GaN layer, green emissive layer, and blue emissive layer all being included in said InGaN-based structures;

said first and second contacts together creating a common-grounded anode;

a first cathode associated with and electrically controlling said red emitter;

a second cathode associated with and electrically controlling said green emitter; and

a third cathode associated with and electrically controlling said blue emitter.

6. A pixel for use in a multicolor illumination device, said pixel comprising:

a red emitter;

a green emitter; and

a blue emitter for generating a blue light emission;

said red, green, and blue emitters being substantially vertically stacked one on top of the other onto a substrate, and

wherein both of said green and blue emitters are transparent relative to a red light emission from said red emitter, and said blue emitter is transparent relative to a green light emission from said green emitter;

wherein said pixel structure comprises;

(i) a buffer layer deposited on said substrate;

(ii) a first n-GaN layer deposited above said buffer layer;

(iii) a first InGaN/GaN multi-quantum well (MQW) active region disposed in electrical contact with said first n-GaN layer, said first InGaN/GaN MQW active region being adapted to generate said blue emissions;

(iv) a first p-GaN layer disposed in electrical contact with said first InGaN/GaN MQW active region;

(v) an at least semi-insulative layer deposited above said first p-GaN layer;

(vi) a second p-GaN layer deposited above said at least semi-insulative layer;

(vii) a second InGaN/GaN MQW active region disposed in electrical contact with said second p-GaN layer, said second InGaN/GaN MQW active region adapted generate said green emissions;

(viii) a second n-GaN layer disposed in electrical contact with said second InGaN/GaN MQW active region;

(ix) a third InGaN/GaN MQW active region disposed in electrical contact with said second n-GaN layer, said third InGaN/GaN MQW active region adapted to generate said red emissions; and

(x) a third p-GaN layer disposed in electrical contact with said third InGaN/GaN MQW active region.

7. The device of claim 6 wherein said substrate is transparent to all of said red, green, and blue light emissions.

8. The device of claim 7 wherein an order of stacking of said emitters includes said blue emitter being deposited proximate said substrate, said green emitter being deposited above said blue emitter, and said red emitter being deposited above said green emitter, said red, green, and blue light emissions passing through said transparent substrate to contribute to a multicolor display.

9. The device of claim 6 wherein tunneling junctions are inserted into the InGaN-based structures.

10. The device of claim 6 wherein an order of stacking of said emitters includes said red emitter being deposited proximate said substrate, said green emitter being deposited above said red emitter, and said blue emitter being deposited above said green emitter, said red, green, and blue light emissions being directed away from said substrate to contribute to a multicolor display.

11. A pixel for use in a multicolor illumination device, said pixel comprising:

a red emitter;

a green emitter; and

a blue emitter for generating a blue light emission;

said red, green, and blue emitters being substantially vertically stacked one on top of the other onto a substrate, and wherein both of said green and blue emitters are caused to be transparent relative to a red light emission from said red emitter, and said blue emitter is caused to be transparent relative to a green light emission from said green emitter;

wherein said pixel is comprised of a hybrid integration of Group III-nitride semiconductors and Group III-V semiconductors;

wherein said green, and blue emitters are comprised of InGaN-based structures and said red emitter is comprised of AlGaInP-based structures;

wherein said substrate is transparent to said blue, green, and red emissions, and said pixel has structures comprising;

a buffer layer on said substrate;

a first Group III-Nitride layer above said buffer layer;

a blue emission layer disposed adjacent to said first Group-III-Nitride layer;

a third Group III-Nitride layer disposed adjacent to said blue emission layer;

a green emission layer disposed adjacent to said first Group-III-Nitride layer;

a second Group-III-Nitride layer above said green emission layer;

an electrically-isolating layer disposed adjacent to said second Group-III-Nitride layer, said electrically-isolating layer insulating between said InGaN-based structures and said AlGaInP-based structures;

a current-spreading layer disposed adjacent to said electrically-isolating layer;

a first AlGaInP layer disposed adjacent to said current-spreading layer;

a red-emission layer disposed adjacent to said AlGaInP layer; and

an second AlGaInP layer disposed adjacent to said red-emission layer.