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MTJ based magnetic field sensor with ESD shunt trace

  • US 8,058,871 B2
  • Filed: 07/08/2008
  • Issued: 11/15/2011
  • Est. Priority Date: 07/08/2008
  • Status: Active Grant
First Claim
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1. An MTJ sensor for magnetic field and current measurements comprising:

  • A first plurality of MTJ structures, each structure containing a second plurality of patterned MTJ cells formed between top and bottom electrodes and connected electrically in parallel thereby, each of said MTJ cells having a resistance that varies in accord with the direction and strength of an external magnetic field applied thereto;

    electrical connections to said electrodes of each of said MTJ structures whereby a sensing current may be injected and extracted from each of said first plurality of MTJ structures and whereby equal portions of said current passes through each of said second plurality of MTJ cells and whereby a measurable voltage is established across each of said second plurality of MTJ cells in accord with the resistances thereof;

    a conducting shunt formed in two portions on each of said first plurality of MTJ structures, each one of said two portions electrically connecting each one of said electrical connections to an external ground connection, said shunt allowing harmless passage of accumulated electrostatic charges on said MTJ structure to ground during manufacture and handling of the sensor, said charges bypassing said MTJ cells in said MTJ structure and averting electrostatic damage thereto;

    whereinsaid shunt is sufficiently resistive so that no more than approximately 5% of said sensing current passes through said shunt during operation of the sensor.

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