Information processing system, information processing method, and computer-readable storage medium

• US 8,060,472 B2
• Filed: 03/03/2010
• Issued: 11/15/2011
• Est. Priority Date: 03/10/2009
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Nakamura, Hajime, Nakagawa, Hisao, Fujiwara, Hiroaki, Itai, Daisuke, Masuda, Mitsuhiro, Ozawa, Kunitaka, Kawauchi, Yoshihiro
• Primary Examiner(s): Alam; Shahid
• Assistant Examiner(s): Quader; Fazlul
• Application Number:
  US12/716,393
• Publication Number:
  US 20100235384A1
• Time in Patent Office: 622 Days
• Field of Search: 707/687, 707/638
• US Class Current: 707/638
• CPC Class Codes: G03F 7/70508 Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
• CPC Class Codes: G03F 7/70525 Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
• CPC Class Codes: G06F 16/20 of structured data, e.g. relational data

Abstract

An information processing system which utilizes apparatus data recorded in a database in conformity with a data definition which can be updated as needed, comprises a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, an extractor configured to extract, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface, and a converter configured to convert an expression of the apparatus data extracted by the extractor into an expression conforming to a data definition designated via the user interface.

Claims

1. An information processing system which utilizes apparatus data recorded in a database in conformity with a data definition which can be updated as needed, the system comprising:

a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, the data definition history being updated in accordance with updating of the data definition;

a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other;

an extractor configured to extract, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface; and

a converter configured to convert an expression of the apparatus data extracted by the extractor into an expression conforming to a data definition designated via the user interface,

wherein the apparatus data is one of data generated by a semiconductor manufacturing apparatus and data obtained by processing the generated data, and

the converter is configured to determine a data definition version of a data definition used within the extraction period by referring to the data definition history, to determine a data definition in the determined data definition version as a data definition of the apparatus data extracted by the extractor by referring to the data definition library, and to convert an expression of the apparatus data into an expression conforming to the designated data definition.

2. The system according to claim 1, further comprising:

a conversion table including a conversion rule to convert an expression of apparatus data,

wherein the converter converts an expression of apparatus data by referring to the conversion table.

3. The system according to claim 2, wherein the conversion table includes at least one of a conversion rule to convert apparatus data conforming to a unit at a conversion source into apparatus data conforming to a unit at a conversion destination, and a conversion rule to convert apparatus data conforming to a numerical expression at a conversion source into apparatus data conforming to a numerical expression at a conversion destination.

4. The system according to claim 1, further comprising:

a data definition manager configured to update the data definition history in accordance with a change in data definition.

5. The system according to claim 4, wherein the data definition manager registers a new data definition in the data definition library in association with a data definition version of the new data definition in accordance with a change in data definition.

6. The system according to claim 4, wherein the data definition manager updates the data definition history in accordance with a change in control software of the semiconductor manufacturing apparatus.

7. An information processing method in an information processing system which utilizes apparatus data recorded in a database in conformity with a data definition which can be updated as needed,

the information processing system including a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, and a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, wherein the data definition history is updated in accordance with updating of the data definition,

the apparatus data being one of data generated by a semiconductor manufacturing apparatus and data obtained by processing the generated data, and

the information processing method comprising the steps of:

extracting, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface;

determining a data definition version of a data definition used within the extraction period by referring to the data definition history, and determining a data definition in the determined data definition version as a data definition of the apparatus data extracted in the extracting step by referring to the data definition library; and

converting an expression of the apparatus data extracted in the extracting step into an expression conforming to a data definition designated via the user interface.

8. A computer-readable storage medium storing a program which causes an information processing system to execute a process for utilizing apparatus data recorded in a database in conformity with a data definition which can be updated as needed,

the information processing system including a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, and a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, wherein the data definition history is updated in accordance with updating of the data definition,

the apparatus data being one of data generated by a semiconductor manufacturing apparatus and data obtained by processing the generated data, and

the program causing the information processing system to execute a process comprising the steps of:

extracting, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface;

determining a data definition version of a data definition used within the extraction period by referring to the data definition history, and determining a data definition in the determined data definition version as a data definition of the apparatus data extracted in the extracting step by referring to the data definition library; and

converting an expression of the apparatus data extracted in the extracting step into an expression conforming to a data definition designated via the user interface.