Exposure method, exposure apparatus, and device manufacturing method

• US 8,064,039 B2
• Filed: 12/19/2006
• Issued: 11/22/2011
• Est. Priority Date: 04/25/2005
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Hoshika, Ryuichi, Fujiwara, Tomoharu, Shiraishi, Kenichi
• Primary Examiner(s): Kim; Peter B
• Application Number:
  US11/640,842
• Publication Number:
  US 20070139632A1
• Time in Patent Office: 1,799 Days
• Field of Search: 355/55, 355/53, 355/67, 430/322, 438/584, 353/53, 250/504
• US Class Current: 355/53
• CPC Class Codes: G03F 7/2041 in the presence of a fluid, e.g. immersion; using fluid cooling means
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/70608 Monitoring the unpatterned workpiece, e.g. measuring thickness, reflectivity or effects of immersion liquid on resist
• CPC Class Codes: G03F 7/70858 Environment aspects, e.g. pressure of beam-path gas, temperature pollution aspects G03F7/70916

Abstract

A liquid immersion device that has an mixing mechanism that mixes and dissolves a predetermined substance for adjusting specific resistance of the liquid, which is supplied onto a liquid repellent film on the surface of an object (member) of a projection optical system placed on the light emitting side of projection optical system, and an liquid immersion area is formed by supplying the liquid in which the predetermined liquid is dissolved onto the liquid repellent film.

Claims

1. An exposure apparatus that exposes an object by irradiating an exposure beam on the object via an optical member and a liquid and forms a predetermined pattern on the object, the apparatus comprising:

a sensor that comprises a member placed on a light emitting side of the optical member, and receives a light that has a same wavelength as the exposure beam via a liquid repellent film on a surface of the member and a liquid on the liquid repellent film; and

a liquid immersion device that has a mixing device in which a predetermined substance that adjusts specific resistance of the liquid supplied onto the liquid repellent film is mixed and dissolved in the liquid, and supplies the liquid in which the predetermined substance is dissolved onto the liquid repellent film so as to form a liquid immersion area, wherein the predetermined substance is a gas.

2. The exposure apparatus of claim 1, further comprising:

an object stage on which the object is mounted, wherein

the member is arranged on the object stage.

3. The exposure apparatus of claim 2, wherein at least one of the object on the object stage and the member is grounded.

4. The exposure apparatus of claim 2, wherein a part of the object stage is made of a conductive material.

5. The exposure apparatus of claim 1, further comprising:

an object stage on which the object is mounted; and

a measurement stage on which the member is arranged, the measurement stage being different from the object stage.

6. The exposure apparatus of claim 1, wherein by adjusting the specific resistance of the liquid, deterioration of the liquid repellent film due to charge of the liquid is prevented.

7. The exposure apparatus of claim 1, further comprising:

an adjustment device that adjusts at least a part of an optical system, taking into consideration a refractive index change of the liquid due to dissolution of the predetermined substance.

8. The exposure apparatus of claim 1, further comprising:

a control device that performs dose control with respect to the object, taking into consideration transmittance change of the liquid due to dissolution of the predetermined substance to a light having the same wavelength as the exposure beam.

9. The exposure apparatus of claim 1, wherein the predetermined substance includes carbon dioxide.

10. A device manufacturing method including a lithographic process, wherein

in said lithographic process, a device pattern is formed on an object by using the exposure apparatus of claim 1.

11. The exposure apparatus of claim 1, wherein

the member comprises a glass member and a metal film, the metal film having a predetermined shape.

12. The exposure apparatus of claim 11, wherein

the metal film has an opening through which the light is received by the sensor.

13. The exposure apparatus of claim 12, wherein

the metal film is grounded.

14. The exposure apparatus of claim 1, wherein

the member is capable of transmitting the light and the sensor receives the light through the member.

15. The exposure apparatus of claim 1, wherein

the liquid repellent film includes a fluorinated resin material or an acrylic resin material.

16. An exposure apparatus that exposes an object by irradiating an exposure beam on the object via an optical member, the apparatus comprising:

a mixing device that supplies a liquid in which an additive is mixed in order to adjust specific resistance of the liquid, wherein the additive is a gas; and

a sensor that comprises a member placed on a light emitting side of the optical member, and receives a light through the optical member and the liquid supplied from the mixing device onto a liquid repellent film on the member.

17. The exposure apparatus of claim 16, further comprising:

an object stage on which the object is mounted, wherein

the member is arranged on the object stage.

18. The exposure apparatus of claim 17, wherein a part of the object stage is made of a conductive material.

19. The exposure apparatus of claim 16, further comprising:

an object stage on which the object is mounted; and

a measurement stage on which the member is arranged, the measurement stage being different from the object stage.

20. The exposure apparatus of claim 16, wherein at least one of the object on an object stage and the member is grounded.

21. The exposure apparatus of claim 16, wherein by adjusting the specific resistance of the liquid, deterioration of the liquid repellent film due to charge of the liquid is prevented.

22. The exposure apparatus of claim 16, further comprising:

an adjustment device that adjusts at least a part of an optical system, taking into consideration a refractive index change of the liquid due to the mixture of the additive.

23. The exposure apparatus of claim 16, further comprising:

a control device that performs dose control with respect to the object, taking into consideration transmittance change of the liquid due to the mixture of the additive.

24. The exposure apparatus of claim 16, wherein the additive includes carbon dioxide.

25. A device manufacturing method comprising:

exposing an object through the optical member of the exposure apparatus defined in claim 16; and

developing the exposed substrate.

26. The exposure apparatus of claim 16, wherein the sensor receives the light through the liquid repellent film.

27. The exposure apparatus of claim 16, wherein the light to be received by the sensor has the same wavelength as the exposure beam.

28. The exposure apparatus of claim 16, wherein

the member comprises a glass member and a metal film, the metal film having a predetermined shape.

29. The exposure apparatus of claim 28, wherein

the metal film has an opening through which the light is received by the sensor.

30. The exposure apparatus of claim 29, wherein

the metal film is grounded.

31. The exposure apparatus of claim 16, wherein

the member is capable of transmitting the light and the sensor receives the light through the member.

32. The exposure apparatus of claim 16, wherein

the liquid repellent film includes a fluorinated resin material or an acrylic resin material.