Exposure apparatus and exposure method
First Claim
Patent Images
1. An exposure apparatus which projects an image of a pattern by an optical member, the exposure apparatus comprising:
- a first support device which supports an object in a hanging manner;
a second support device which supports the optical member in a hanging manner separately from the object; and
a moving device which moves the object relative to the optical member along an optical axis of the optical member.
0 Assignments
0 Petitions
Accused Products
Abstract
Disclosed is an exposing apparatus which projects an image of a pattern by a projection optical system, comprising a measuring unit having a sensor which measures a positional relationship between the projection optical system and a member which is positioned in relation to the projection optical system, and a first support device which has a first soft structure and which supports the measuring unit in a hanging manner separately from the projection optical system.
-
Citations
22 Claims
-
1. An exposure apparatus which projects an image of a pattern by an optical member, the exposure apparatus comprising:
-
a first support device which supports an object in a hanging manner; a second support device which supports the optical member in a hanging manner separately from the object; and a moving device which moves the object relative to the optical member along an optical axis of the optical member. - View Dependent Claims (2)
-
-
3. An exposure apparatus which projects an image of a pattern by an optical member, the exposure apparatus comprising:
-
a measuring device having a sensor which measures a positional relationship between the optical member and a member which is positioned in relation to the optical member; and a first support device which supports the measuring device in a hanging manner separately from the optical member.
-
-
4. An exposure apparatus which forms an image of a predetermined pattern on a substrate by a projection optical system and a liquid, the exposure apparatus comprising:
-
a base member; a moving member which supports the substrate and which can move in relation to the base member; a first support device which supports the projection optical system in relation to the base member; a second support device which supports an object in a hanging manner separately from the projection optical system in relation to the base member; and a driving device which produces driving power so that the object and the projection optical system are in a predetermined positional relationship in a vertical direction. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. An exposure method which forms an image of a predetermined pattern on a substrate by a projection optical system and a liquid, the exposure method comprising:
-
supporting the projection optical system in relation to a base member; supporting an object in a hanging manner separately from the projection optical system in relation to the base member; and producing driving power so that the object and the projection optical system are in a predetermined positional relationship in a vertical direction. - View Dependent Claims (17, 18, 19, 20, 21, 22)
-
Specification