MEMS accelerometer

• US 8,065,915 B2
• Filed: 10/08/2008
• Issued: 11/29/2011
• Est. Priority Date: 10/08/2008
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Dwyer, Paul W.
• Primary Examiner(s): Kwok; Helen C.
• Application Number:
  US12/247,921
• Publication Number:
  US 20100083760A1
• Time in Patent Office: 1,147 Days
• Field of Search: 735/143.1, 735/142.1, 735/142.2, 735/142.3, 735/143.2, 735/143.6, 735/143.7, 735/141.2, 735/141.3
• US Class Current: 73/514.31
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/132 with electromagnetic counterbalancing means
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends

Abstract

Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass suspended by at least one hinge type flexure, at least one planar coil located on the proof mass, and at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane. In an example embodiment, the angle is approximately 45 degrees. The at least one magnet may include a first annular magnet positioned on a first side of the proof mass and a second annular magnet positioned on a second side of the proof mass. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Claims

1. A microelectromechanical (MEMS) accelerometer comprising:

a proof mass suspended by a hinge type flexure;

at least one planar coil located on the proof mass, the at least one planar coil having a coil plane; and

at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at a flux angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane.

2. The MEMS accelerometer of claim 1, wherein the at least one magnet includes at least one annular magnet.

3. The MEMS accelerometer of claim 2, wherein the at least one magnet comprises:

a first annular magnet positioned on a first side of the proof mass; and

a second annular magnet positioned on a second side of the proof mass,

wherein the second annular magnet has an inner diameter smaller than an inner diameter of the first annular magnet and an outer diameter smaller than an outer diameter of the first annular magnet.

4. The MEMS accelerometer of claim 1, further comprising a magnetic return path structure coupled to the at least one magnet.

5. The MEMS accelerometer of claim 4, wherein the magnetic return path structure extends from a first side of the proof mass to a second side of the proof mass.

6. The MEMS accelerometer of claim 1, wherein the at least one planar coil comprises:

a first planar coil on a first side of the proof mass; and

a second planar coil on a second side of the proof mass.

7. The MEMS accelerometer of claim 1, wherein the angle is approximately 45 degrees.

8. The MEMS accelerometer of claim 1, wherein the angle is between approximately 40 degrees and approximately 50 degrees.

9. A method of sensing acceleration with a MEMS accelerometer that includes a proof mass suspended by at least one hinge type flexure, at least one planar coil located on the proof mass, the at least one planar coil having a coil plane, and at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at a flux angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, the method comprising:

sensing a capacitance of a pickoff in the MEMS accelerometer; and

rebalancing the MEMS accelerometer by sending a current through the at east one planar coil such that the current passes through the magnetic flux field,

wherein the current is based on the sensed capacitance.

10. The method of claim 9, wherein rebalancing includes sending a current through a first planar coil on a first side of the proof mass and through a second planar coil on a second side of the proof mass.

11. The method of claim 9, wherein sensing a capacitance of a pickoff in the MEMS accelerometer includes sensing a differential change in capacitance of a first pickoff and a second pickoff.

12. A microelectromechanical (MEMS) accelerometer comprising:

a MEMS proof mass suspended by at least one hinge type flexure;

a first planar coil located on a first side of the proof mass, the first planar coil having a first coil plane;

a second planar coil located on a second side of the proof mass, the second planar coil having a second coil plane;

a first annular magnet positioned on a first side of the proof mass;

a second annular magnet positioned on a second side of the proof mass; and

a magnetic return path structure coupled to the first annular magnet and the second annular magnet,

wherein the first and second annular magnets are positioned such that a magnetic flux field passes through the first and second planar coils a flux angle of approximately 45 degrees relative to the first and second coil planes.