Methods of forming recessed access devices associated with semiconductor constructions
First Claim
1. A method of forming recessed access devices, comprising:
- forming recessed access device channels extending into a semiconductor substrate;
filling the recessed access device channels with a first electrically insulative material;
patterning the first electrically insulative material into a mask defining a plurality of access device regions, the access device regions being islands surrounded by an isolation region;
the access device regions comprising only portions of the recessed access device channels;
etching into the substrate of said isolation region to form a trench within the isolation region;
after forming the trench, covering the substrate with an electrically insulative laminate comprising silicon dioxide over silicon nitride;
the laminate filling the isolation region trench;
removing the first electrically insulative material to reopen the recessed access device channels while leaving the electrically insulative laminate within the isolation region trench; and
forming gate material within the re-opened recessed access device channels.
7 Assignments
0 Petitions
Accused Products
Abstract
The invention includes methods of forming recessed access devices. A substrate is provided to have recessed access device trenches therein. A pair of the recessed access device trenches are adjacent one another. Electrically conductive material is formed within the recessed access device trenches, and source/drain regions are formed proximate the electrically conductive material. The electrically conductive material and source/drain regions together are incorporated into a pair of adjacent recessed access devices. After the recessed access device trenches are formed within the substrate, an isolation region trench is formed between the adjacent recessed access devices and filled with electrically insulative material to form a trenched isolation region.
-
Citations
14 Claims
-
1. A method of forming recessed access devices, comprising:
-
forming recessed access device channels extending into a semiconductor substrate; filling the recessed access device channels with a first electrically insulative material; patterning the first electrically insulative material into a mask defining a plurality of access device regions, the access device regions being islands surrounded by an isolation region;
the access device regions comprising only portions of the recessed access device channels;etching into the substrate of said isolation region to form a trench within the isolation region; after forming the trench, covering the substrate with an electrically insulative laminate comprising silicon dioxide over silicon nitride;
the laminate filling the isolation region trench;removing the first electrically insulative material to reopen the recessed access device channels while leaving the electrically insulative laminate within the isolation region trench; and forming gate material within the re-opened recessed access device channels. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A method of forming recessed access devices, comprising:
-
forming recessed access device channels extending into a semiconductor material; filling the recessed access device channels with a gate material; forming a first electrically insulative material over the gate material and over the semiconductor material; patterning the first electrically insulative material into a mask defining a plurality of access device regions, the access device regions being islands surrounded by an isolation region;
the access device regions comprising only portions of the recessed access device channels;
the access device regions being substantially elliptical;etching into the semiconductor material of said isolation region to form a trench extending into the isolation region, the etching also removing the gate material from between the access device regions; filling the trenched isolation region with a second electrically insulative material; removing the first electrically insulative material; and after removing the first electrically insulative material, forming a plurality of conductive lines, individual conductive lines extending across multiple access device regions and electrically interconnecting gate material of the multiple access device regions with one another. - View Dependent Claims (9, 10, 11, 12, 13, 14)
-
Specification