Microelectromechanical device with spacing layer
First Claim
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1. A device comprising:
- a substrate;
a fixed reflector;
a movable reflector comprising an electrically conductive material, wherein an interferometric cavity is defined between the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position, a second position, and a third position; and
a spacing layer positioned on a side of the fixed reflector that is opposite from the movable reflector, wherein the spacing layer is positioned between the fixed reflector and the substrate, wherein the spacing layer provides a filtering cavity configured to improve color saturation of light reflected by the interferometric cavity.
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Abstract
An interferometric modulating device is provided with a spacing layer positioned between the fixed reflector and the electrode. The spacing layer prevents shorting between the movable reflector and the electrode and provides a filtering cavity to improve color saturation.
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Citations
42 Claims
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1. A device comprising:
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a substrate; a fixed reflector; a movable reflector comprising an electrically conductive material, wherein an interferometric cavity is defined between the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position, a second position, and a third position; and a spacing layer positioned on a side of the fixed reflector that is opposite from the movable reflector, wherein the spacing layer is positioned between the fixed reflector and the substrate, wherein the spacing layer provides a filtering cavity configured to improve color saturation of light reflected by the interferometric cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 39)
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16. A device comprising:
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a substrate; a fixed reflector; a movable reflector comprising an electrically conductive material, wherein an interferometric cavity is defined between the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position, a second position, and a third position; and a spacing layer positioned on a side of the fixed reflector that is opposite from the movable reflector, the spacing layer being positioned between the fixed reflector and the substrate, the spacing layer being greater than or equal to 160 nm in thickness from a cross-sectional view of the device, wherein the spacing layer provides a filtering cavity configured to improve color saturation of light reflected by the interferometric cavity. - View Dependent Claims (17, 18, 19, 40)
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20. A device comprising:
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a substrate; first means for reflecting light, the first reflecting means being fixed; second means for reflecting light, the second reflecting means being movable and comprising an electrically conductive material, wherein an interferometric cavity is defined between the first reflecting means and the second reflecting means, the second reflecting means being movable between at least a first position, a second position, and a third position; and means for separating the first reflecting means positioned on a side of the first reflecting means that is opposite from the second reflecting means, wherein the means for separating the first reflecting means is positioned between the first reflecting means and the substrate, wherein the means for separating the first reflecting means provides a filtering cavity configured to improve color saturation of light reflected by the interferometric cavity. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 41)
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29. A method of making a device for modulating light, the method comprising:
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providing a substrate; forming a spacing layer; forming a fixed reflector such that the spacing layer is disposed between the substrate and the fixed reflector; and forming a movable reflector comprising an electrically conductive material; wherein an interferometric cavity is defined between the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position, a second position, and a third position; and wherein the spacing layer provides a filtering cavity configured to improve color saturation of light reflected by the interferometric cavity. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38, 42)
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Specification