×

X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging

  • US 8,069,726 B2
  • Filed: 11/18/2009
  • Issued: 12/06/2011
  • Est. Priority Date: 11/18/2005
  • Status: Active Grant
First Claim
Patent Images

1. A sensor for measuring angular velocity in a sensor plane, the sensor comprising:

  • a sensing subassembly comprising;

    i) a substantially planar frame parallel to the plane;

    ii) a first mass disposed in the plane;

    iii) a second mass disposed in the plane laterally to the first mass; and

    iv) a linkage within the frame and connected to the frame, wherein the linkage is connected to the first mass and to the second mass and wherein the linkage constrains the first and second masses to move in opposite directions perpendicular to the plane;

    wherein the linkage and the substantially planar frame are both anchored to a base;

    an actuator for driving a first portion of the subassembly into oscillation at a drive frequency; and

    a transducer for sensing motion of a second portion of the subassembly responsive to the angular velocity.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×