X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
First Claim
1. A sensor for measuring angular velocity in a sensor plane, the sensor comprising:
- a sensing subassembly comprising;
i) a substantially planar frame parallel to the plane;
ii) a first mass disposed in the plane;
iii) a second mass disposed in the plane laterally to the first mass; and
iv) a linkage within the frame and connected to the frame, wherein the linkage is connected to the first mass and to the second mass and wherein the linkage constrains the first and second masses to move in opposite directions perpendicular to the plane;
wherein the linkage and the substantially planar frame are both anchored to a base;
an actuator for driving a first portion of the subassembly into oscillation at a drive frequency; and
a transducer for sensing motion of a second portion of the subassembly responsive to the angular velocity.
1 Assignment
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Accused Products
Abstract
An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.
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Citations
32 Claims
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1. A sensor for measuring angular velocity in a sensor plane, the sensor comprising:
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a sensing subassembly comprising;
i) a substantially planar frame parallel to the plane;
ii) a first mass disposed in the plane;
iii) a second mass disposed in the plane laterally to the first mass; and
iv) a linkage within the frame and connected to the frame, wherein the linkage is connected to the first mass and to the second mass and wherein the linkage constrains the first and second masses to move in opposite directions perpendicular to the plane;
wherein the linkage and the substantially planar frame are both anchored to a base;an actuator for driving a first portion of the subassembly into oscillation at a drive frequency; and a transducer for sensing motion of a second portion of the subassembly responsive to the angular velocity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A sensor for measuring angular velocity in a sensor plane, the sensor comprising:
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a sensing subassembly comprising;
i) a substantially planar frame parallel to the plane; and
ii) a linkage within the frame, wherein the linkage is connected to the substantially planar frame and wherein the frame is anchored to a base and the linkage is anchored the base, wherein the linkage comprises a center plate connected to the frame which is rotatable about a center axis of rotation;an actuator for driving a first portion of the subassembly into oscillation at a drive frequency; and a transducer for sensing motion of a second portion of the subassembly responsive to the angular velocity. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification