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Electrochemical fabrication method including elastic joining of structures

  • US 8,070,931 B1
  • Filed: 12/29/2008
  • Issued: 12/06/2011
  • Est. Priority Date: 05/07/2002
  • Status: Expired due to Fees
First Claim
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1. A method for forming a multi-element three-dimensional structure, comprising:

  • (A) forming a first element of the multi-element three-dimensional structure from a plurality of successively formed layers, wherein each successive layer comprises at least two materials and is formed on and adhered to a previously formed layer, one of the at least two materials is a structural material and the other of the at least two materials is a sacrificial material, and wherein each successive layer defines a successive cross-section of the three-dimensional structure, and wherein the forming of each of the plurality of successive layers comprises;

    (i) depositing a first of the at least two materials;

    (ii) depositing a second of the at least two materials;

    (iii) planarizing the first and second materials; and

    (B) after the forming of the plurality of successive layers, separating at least a portion of the sacrificial material from multiple layers of the structural material to reveal the first element of the multi-element three-dimensional structure;

    (C) supplying a second element of the multi-element three-dimensional structure; and

    (D) bringing the first and second elements into contact with one another and elastically deforming at least an initial deformation portion of one of the elements relative to the other element to bring the at least two elements into a desired retention configuration which is maintained at least in part by the structural strength of the elements and the at least partial reformation of the deformation portion as the elements move into the retention configuration wherein the depositing of at least one of the two materials is by electroplating.

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