Multi-function light sensor
First Claim
1. A light sensor comprising:
- a first light receiving element having sensitivity to ultraviolet light, the first light receiving element being formed on a silicon semiconductor layer of an SOI substrate provided with a silicon substrate, an insulating film formed on the silicon substrate, and the silicon semiconductor layer formed on the insulating film;
a second light receiving element having sensitivity to visible light or infrared light, the second light receiving element being formed on the silicon substrate along the surface direction of a main face of the SOI substrate in a second region that is adjacent to a first region where the first light receiving element is formed; and
a third light receiving element having sensitivity to visible light or infrared light, the third light receiving element being formed on the silicon substrate along the surface direction in a third region that is adjacent to the first region formed with the first light receiving element and that is separated by a predetermined separation distance from the second region.
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Accused Products
Abstract
The light sensor according to an exemplary embodiment of the present invention is a multi-function light sensor that is equipped at low cost with both an ultraviolet light sensor and a visible light sensor and suppresses leak current between adjacent elements on the same substrate. The light sensor is equipped with a SOI substrate, formed from a silicon oxide insulating film and a silicon semiconductor layer made up from single crystal silicon, on a silicon substrate. Photodiodes PD1 and PD2 are formed on the silicon substrate, and a photodiode UV-PD, and main portions (source, drain and channel regions) of a MOSFET configuring a control circuit, are formed in the silicon semiconductor layer on the insulating film.
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Citations
11 Claims
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1. A light sensor comprising:
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a first light receiving element having sensitivity to ultraviolet light, the first light receiving element being formed on a silicon semiconductor layer of an SOI substrate provided with a silicon substrate, an insulating film formed on the silicon substrate, and the silicon semiconductor layer formed on the insulating film; a second light receiving element having sensitivity to visible light or infrared light, the second light receiving element being formed on the silicon substrate along the surface direction of a main face of the SOI substrate in a second region that is adjacent to a first region where the first light receiving element is formed; and a third light receiving element having sensitivity to visible light or infrared light, the third light receiving element being formed on the silicon substrate along the surface direction in a third region that is adjacent to the first region formed with the first light receiving element and that is separated by a predetermined separation distance from the second region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A light sensor comprising:
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an SOI (silicon-on-insulator) substrate including a silicon substrate, an insulating film formed on the silicon substrate, and a silicon semiconductor layer formed on the insulating film; a first light receiving element formed on the silicon semiconductor layer and being sensitive to ultraviolet light; a second light receiving element formed on the silicon substrate and being sensitive to visible light or infrared light; and a third light receiving element formed on the silicon substrate and being sensitive to visible light or infrared light, wherein the second and third light receiving elements, in a direction parallel to a main face of the SOI substrate, are separated from each other by a predetermined distance, and are both adjacent to the first light receiving element.
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Specification