Thermal-mechanical signal processing

• US 8,072,117 B2
• Filed: 02/20/2006
• Issued: 12/06/2011
• Est. Priority Date: 08/20/2003
• Status: Active Grant

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University), Naval Research Laboratory (U.S. Department Of Defense)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University), Naval Research Laboratory (U.S. Department Of Defense)
• Inventors: Zalalutdinov, Maxim, Reichenbach, Robert B., Aubin, Keith, Houston, Brian H., Parpia, Jeevak M., Craighead, Harold G.
• Primary Examiner(s): Trinh, Sonny
• Application Number:
  US11/358,917
• Publication Number:
  US 20060238239A1
• Time in Patent Office: 2,115 Days
• Field of Search: 310/306, 310/324, 310/371, 310/367, 310/369, 331/116.M, 331/176, 735/79, 736/55, 438/53
• US Class Current: 310/306
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: H03B 5/30 with frequency-determining element being electromechanical resonator
• CPC Class Codes: H03C 1/46 Modulators with mechanically-driven or acoustically-driven parts
• CPC Class Codes: H03D 1/00 Demodulation of amplitude-modulated oscillations H03D5/00, H03D9/00, H03D11/00 take precedence
• CPC Class Codes: H03D 1/02 Details
• CPC Class Codes: H03D 3/34 by means of electromechanical devices H03D3/16 takes precedence
• CPC Class Codes: H03H 2009/02488 Vibration modes
• CPC Class Codes: H03H 2009/02511 Vertical, i.e. perpendicular to the substrate plane
• CPC Class Codes: H03H 3/0072 of microelectro-mechanical resonators or networks micromembranes or microbeams B81B2203/01; manufacture of microstructural devices in general B81C
• CPC Class Codes: H03H 9/02259 Driving or detection means
• CPC Class Codes: H03H 9/2405 of microelectro-mechanical resonators
• CPC Class Codes: H03H 9/2436 Disk resonators

Abstract

A source signal is converted into a time-variant temperature field with transduction into mechanical motion. In one embodiment, the conversion of a source signal into the time-variant temperature field is provided by utilizing a micro-fabricated fast response, bolometer-type radio frequency power meter. A resonant-type micromechanical thermal actuator may be utilized for temperature read-out and demodulation.

Claims

1. A device for extracting base-band information from a broadcast signal, the device comprising:

means for converting the broadcast signal into temperature oscillations; and

means for converting the temperature oscillations into mechanical motion.

2. A device for extracting base-band information from a broadcast signal, the device comprising:

a micro-fabricated bolometer that converts the broadcast signal into temperature oscillations; and

a micro-fabricated thermo-mechanical actuator proximate the bolometer that converts the temperature oscillations into mechanical motion.

3. The device of claim 2 wherein the actuator has a resonant frequency that approximately matches the frequency of temperature oscillations.

4. The device of claim 2 wherein the bolometer is directly coupled to a peripheral portion of the thermo-mechanical actuator.

5. The device of claim 2 wherein the thermo-mechanical actuator comprises a dome type micro-fabricated oscillator.

6. The device of claim 5, wherein the dome type micro-fabricated thermo-mechanical actuator comprises a hole in the center, and is supported by a substrate.

7. The device of claim 6, wherein the substrate further comprises circuitry for processing the base-band information.

8. A method comprising:

converting a source signal into a time-variant temperature field;

modulating mechanical motion with the time-variant temperature field; and

measuring the mechanical motion.

9. The method of claim 8 wherein the measured mechanical motion is converted into an output signal representative of the source signal.

10. The method of claim 8 wherein the mechanical motion is provided by a mechanical resonator having a resonant frequency compatible with the source signal.

11. The method of claim 10 wherein the mechanical resonator has dimensions in the micrometer to nanometer range.

12. A device for extracting base-band information from a broadcast signal, the device comprising:

a micro-fabricated bolometer that converts the base-band information in the broadcast signal into a time varying heat field;

a micro-fabricated thermo-mechanical actuator having a dome shape supported by a substrate, the bolometer positioned on a periphery of the dome shape such that the time varying heat field provided by the bolometer modifies mechanical oscillation of the actuator; and

means for generating a signal responsive to the modified mechanical oscillation of the actuator.

13. The device of claim 12 wherein the means for generating a signal responsive to the modified mechanical oscillation of the actuator comprises an interferometer.

14. A frequency generator comprising:

a mechanical resonator;

a microheater coupled to the resonator;

means for measuring motion of the mechanical resonator; and

means for providing feedback to the microheater.

15. The device of claim 14 wherein the resonator comprises a dome type micro-fabricated oscillator.

16. The device of claim 15, wherein the dome type micro-fabricated actuator comprises a hole in the center, and is supported by a substrate.

17. The device of claim 14 wherein the microheater comprises a bolometer that is thermally responsive to RF signals.

18. The device of claim 14 wherein the means for measuring motion of the mechanical resonator comprises an interferometer.