Comb sense microphone
First Claim
1. A miniature microphone, comprising:
- a) a diaphragm, supported for displacement in response to acoustic waves over a cavity;
b) a plurality of projections extending from the diaphragm, said plurality of projections being electrically interconnected, and having a portion sufficiently conductive to act as a first plate of an electrostatic displacement sensor, and having a first electrical connection;
c) a plurality of concavities in a surface, said plurality of concavities being electrically interconnected, and having a portion sufficiently conductive to act as a second plate of an electrostatic displacement sensor, and having a second electrical connection; and
d) a body, supporting said surface and being adapted to position said plurality of concavities proximate to said plurality of projections in a configuration adapted to electrostatically interact with each other, said diaphragm being displaceable with respect to said body in response to acoustic waves, to thereby cause a change in relative position between said plurality of projections and said plurality of concavities, and produce an electrical signal responsive to a displacement of said diaphragm with respect to said body at the first and second electrical connections, said body being further adapted to maintain an electrical isolation of said first electrical connection and said second electrical connection.
2 Assignments
0 Petitions
Accused Products
Abstract
A miniature microphone, comprising a diaphragm, supported for displacement in response to acoustic waves, from which a plurality of projections extend; a plurality of projections extending from a surface; a body, supporting the surface to maintain the plurality of projections from the diaphragm and the plurality of projections from the surface in close proximity; and an electromagnetic sensor adapted to sense an electromagnetic interaction between the plurality of projections from the diaphragm and the plurality of projections from the surface and produce an electrical signal in response thereto. The interaction may be detected substantially without inducing a force which tends to substantially displace the diaphragm, since the electrostatic force is substantially parallel to the diaphragm surface.
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Citations
20 Claims
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1. A miniature microphone, comprising:
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a) a diaphragm, supported for displacement in response to acoustic waves over a cavity; b) a plurality of projections extending from the diaphragm, said plurality of projections being electrically interconnected, and having a portion sufficiently conductive to act as a first plate of an electrostatic displacement sensor, and having a first electrical connection; c) a plurality of concavities in a surface, said plurality of concavities being electrically interconnected, and having a portion sufficiently conductive to act as a second plate of an electrostatic displacement sensor, and having a second electrical connection; and d) a body, supporting said surface and being adapted to position said plurality of concavities proximate to said plurality of projections in a configuration adapted to electrostatically interact with each other, said diaphragm being displaceable with respect to said body in response to acoustic waves, to thereby cause a change in relative position between said plurality of projections and said plurality of concavities, and produce an electrical signal responsive to a displacement of said diaphragm with respect to said body at the first and second electrical connections, said body being further adapted to maintain an electrical isolation of said first electrical connection and said second electrical connection. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A miniature microphone, comprising:
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a) a diaphragm, supported for displacement in response to acoustic waves, having a plurality of projections extending therefrom; b) a plurality of projections extending from a surface; c) a body, supporting the surface to maintain the plurality of projections from the diaphragm and the plurality of projections from the surface in close proximity; and d) an electromagnetic sensor adapted to sense an electromagnetic interaction between the plurality of projections from the diaphragm and the plurality of projections from the surface and produce an electrical signal in response thereto. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A method of detecting acoustic waves, comprising:
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a) providing a diaphragm, supported for displacement in response to acoustic waves, having a plurality of projections extending therefrom, interacting with a plurality of projections extending from a surface, and a body, supporting the surface to maintain the plurality of projections from the diaphragm and the plurality of projections from the surface in close proximity; b) electromagnetically sensing an interaction between the plurality of projections from the diaphragm and the plurality of projections from the surface, substantially without inducing a force which tends to substantially displace the diaphragm; and c) outputting an electrical signal corresponding to a displacement of the diaphragm in response to acoustic waves, based on the electromagnetically sensed interaction. - View Dependent Claims (19, 20)
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Specification