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MEMS integrated circuit comprising peristaltic microfluidic pump

  • US 8,075,855 B2
  • Filed: 06/20/2008
  • Issued: 12/13/2011
  • Est. Priority Date: 06/20/2008
  • Status: Expired due to Fees
First Claim
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1. A MEMS integrated circuit comprising one or more peristaltic microfluidic pumps and control circuitry for said one or more pumps, each pump comprising:

  • a pumping chamber positioned between an inlet and an outlet;

    a plurality of moveable fingers positioned in a wall of said pumping chamber, said fingers being arranged in a row along said wall; and

    a plurality of thermal bend actuators, each actuator being associated with a respective finger such that actuation of said thermal bend actuator causes movement of said respective finger into said pumping chamber,wherein said control circuitry controls actuation of said plurality of actuators, and said control circuitry is configured to provide a peristaltic pumping action in each pumping chamber via peristaltic movement of said fingers.

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