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Materials for imprint lithography

  • US 8,076,386 B2
  • Filed: 02/23/2004
  • Issued: 12/13/2011
  • Est. Priority Date: 02/23/2004
  • Status: Active Grant
First Claim
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1. An imprinting material for use in imprint lithography comprising:

  • a composition having a viscosity associated therewith and including a surfactant, a polymerizable component, and an initiator responsive to a stimuli to vary said viscosity in response thereto, with said composition, in a liquid state, having said viscosity being lower than about 100 centipoises, a vapor pressure of less than about 20 Torr, and in a solid cured state a tensile modulus of greater than about 100 MPa, a break stress of greater than about 3 MPa and an elongation at break of greater than about 2%.

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