Multiple element electrode cMUT devices and fabrication methods
First Claim
1. In a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receiving ultrasonic energy, the forward or side looking catheter device comprising:
- a plurality of cMUT arrays being disposed on a substrate in a spaced apart arrangement so that the cMUT arrays are disposed at differing locations on the substrate, the plurality of cMUT arrays each comprising a plurality of cMUT elements,at least a portion of the plurality of cMUT elements comprising a flexible membrane disposed above the substrate a first electrode disposed on the membrane and a second electrode disposed on the substrate, at least one of the first and second electrodes being a multiple element electrode, the multiple element electrode comprising a plurality of electrode elements, andthe plurality of electrode elements being shaped and sized to have a width less than the width of the membrane, and being further configured to operatively shape the membrane in a reception state to receive ultrasonic energy and a transmission state to transmit ultrasonic energy.
1 Assignment
0 Petitions
Accused Products
Abstract
Multiple electrode element capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. Some embodiments can include a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receiving ultrasonic energy. The forward or side looking intravascular device can generally comprise a plurality of cMUT arrays being disposed on a substrate in a spaced apart arrangement. The plurality of cMUT arrays can each comprise a plurality of cMUT elements. At least a portion of the plurality of cMUT elements can comprise a flexible membrane disposed above the substrate and a multiple element electrode. The multiple element electrode can comprise a plurality of electrode elements shaped and sized to have a width less than the width of the membrane, and be further configured to operatively shape the membrane in a reception state to receive ultrasonic energy and a transmission state to transmit ultrasonic energy.
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Citations
16 Claims
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1. In a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receiving ultrasonic energy, the forward or side looking catheter device comprising:
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a plurality of cMUT arrays being disposed on a substrate in a spaced apart arrangement so that the cMUT arrays are disposed at differing locations on the substrate, the plurality of cMUT arrays each comprising a plurality of cMUT elements, at least a portion of the plurality of cMUT elements comprising a flexible membrane disposed above the substrate a first electrode disposed on the membrane and a second electrode disposed on the substrate, at least one of the first and second electrodes being a multiple element electrode, the multiple element electrode comprising a plurality of electrode elements, and the plurality of electrode elements being shaped and sized to have a width less than the width of the membrane, and being further configured to operatively shape the membrane in a reception state to receive ultrasonic energy and a transmission state to transmit ultrasonic energy. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A cMUT-based device configured as a forward or side looking ultrasonic array device that comprises a plurality of cMUT devices, the forward or side looking ultrasonic array device comprising:
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a plurality of cMUT devices formed in a plurality of array portions, the array portions being disposed at differing locations on a substrate that carries the cMUT devices; and at least some of the cMUT devices comprising a membrane that defines a cavity situated between the membrane and the substrate a first electrode disposed on the membrane and a second electrode disposed on the substrate, at least one of the first and second electrodes comprising a plurality of electrode elements, each having a cross-sectional width less than the membrane, the electrode elements being spaced apart from each other and forming part of different circuits and being operatively configured for displacement of the membrane for reception and transmission of ultrasonic waves, and wherein the electrode elements can receive and transmit ultrasonic wave energy independent of each other due to being part of different circuits. - View Dependent Claims (13, 14, 15, 16)
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Specification