Human-readable, bi-state environmental sensors based on micro-mechanical membranes

• US 8,077,326 B1
• Filed: 03/31/2008
• Issued: 12/13/2011
• Est. Priority Date: 03/31/2008
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Webster, James Randolph
• Primary Examiner(s): Lyons, Michael A
• Application Number:
  US12/060,090
• Publication Number:
  US 20110292489A1
• Time in Patent Office: 1,352 Days
• Field of Search: 356/519, 359/290, 359/291
• US Class Current: 356/519
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movable member of the interferometric modulator. The reactive layer, coating, or proof mass can expand, contract, bend, or otherwise move when exposed to a predefined chemical, level of humidity, temperature threshold, type of radiation, and/or level of mechanical shock, causing the interferometric modulator to collapse and permanently indicate such exposure.

Claims

1. A sensor, comprising:

an interferometric modulator, the modulator configured to permanently actuate in response to exposure to a predetermined combination of a first environmental stimulus and a second environmental stimulus.

2. The sensor of claim 1, wherein said actuation occurs without requiring application of a voltage across the interferometric modulator.

3. The sensor of claim 1, wherein the interferometric modulator comprises an optical stack and a movable layer, the movable layer being configured to contact the optical stack in response to said first environmental stimulus.

4. The sensor of claim 3, wherein the optical stack and the movable layer are configured to permanently adhere together when said contact occurs in the presence of said second environmental stimulus.

5. The sensor of claim 3, wherein the optical stack and the movable layer are configured to temporarily contact one another when said contact occurs without the presence of said second environmental stimulus.

6. The sensor of claim 1, wherein the first environmental stimulus is a predetermined ambient temperature.

7. The sensor of claim 6, wherein the movable layer comprises at least two films having differing coefficients of thermal expansion, said coefficients being selected to cause the movable layer to deflect and contact the optical stack in response to said predetermined ambient temperature.

8. The sensor of claim 6, wherein the movable layer comprises a membrane suspended over the optical stack and attached to a rigid support member, said membrane being configured to expand and contact the optical stack in response to said predetermined ambient temperature.

9. The sensor of claim 6, wherein the second environmental stimulus is a predetermined level of humidity.

10. The sensor of claim 6, wherein the second environmental stimulus is a predetermined chemical.

11. The sensor of claim 6, wherein the second environmental stimulus is a predetermined level of mechanical shock.

12. The sensor of claim 6, wherein the second environmental stimulus is a predetermined level of radiation.

13. The sensor of claim 1, wherein the first environmental stimulus is a predetermined level of humidity.

14. The sensor of claim 13, wherein the second environmental stimulus is a predetermined ambient temperature.

15. The sensor of claim 13, wherein the second environmental stimulus is a predetermined chemical species.

16. The sensor of claim 13, wherein the second environmental stimulus is a predetermined level of mechanical shock.

17. The sensor of claim 13, wherein the second environmental stimulus is a predetermined level of radiation.

18. The sensor of claim 1, further comprising a package configured to seal an internal environment of the interferometric modulator from an external environment, the internal environment being configured to prevent permanent actuation of the modulator, the package comprising at least one removable portion configured to expose the internal environment to the external environment upon removal to activate said sensor.

21. A display comprising an array of sensors according to claim 1.

19. A sensor comprising:

means for interferometrically modulating light;

means for inducing collapse of the light modulating means in response to a first predefined environmental condition; and

means for ensuring that said collapse is permanent if said collapse occurs in the presence of a second predefined environmental condition.

20. The sensor of claim 19, wherein said collapse occurs without requiring application of a voltage across the light modulating means.