Interferometric optical display system with broadband characteristics
First Claim
1. A method of making a display device, comprising:
- providing a transparent substrate;
forming an absorber layer on the substrate; and
forming an array of interferometric modulators, wherein the interferometric modulators include a movable reflective layer over the absorber layer, the absorber layer having an extinction coefficient (k) below a threshold value for wavelengths of light within an operative optical range of the interferometric modulators, the absorber layer also having a refractive index (n) that increases as the wavelength of light increases within the operative optical range of the interferometric modulators.
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Accused Products
Abstract
Broad band white color can be achieved in MEMS display devices by incorporating a material having an extinction coefficient (k) below a threshold value for wavelength of light within an operative optical range of the interferometric modulator. One embodiment provides a method of making the MEMS display device comprising depositing said material over at least a portion of a transparent substrate, depositing a dielectric layer over the layer of material, forming a sacrificial layer over the dielectric, depositing an electrically conductive layer on the sacrificial layer, and forming a cavity by removing at least a portion of the sacrificial layer. The suitable material may comprise germanium, germanium alloy of various compositions, doped germanium or doped germanium-containing alloys, and may be deposited over the transparent substrate, incorporated within the transparent substrate or the dielectric layer.
179 Citations
27 Claims
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1. A method of making a display device, comprising:
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providing a transparent substrate; forming an absorber layer on the substrate; and forming an array of interferometric modulators, wherein the interferometric modulators include a movable reflective layer over the absorber layer, the absorber layer having an extinction coefficient (k) below a threshold value for wavelengths of light within an operative optical range of the interferometric modulators, the absorber layer also having a refractive index (n) that increases as the wavelength of light increases within the operative optical range of the interferometric modulators. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method of using a display device, comprising:
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transmitting light through a substrate; and interferometrically reflecting light with an interferometric modulator including an absorber over a portion of the substrate and a movable reflective layer over the absorber, wherein the absorber has an extinction coefficient (k) below a threshold value for wavelengths of light within an operative optical range of the interferometric modulator, and wherein the absorber has a refractive index (n) that increases as the wavelength of light increases within the operative optical range of the interferometric modulator. - View Dependent Claims (23, 24, 25, 26, 27)
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Specification