MEMS gyroscope with output oscillation about the normal to the plane
First Claim
1. A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis that lies in the plane, comprising:
- a substrate defining a top surface;
spaced bonding pads coupled to the substrate and projecting above the top surface of the substrate;
a generally planar plate outer member spaced above and essentially parallel to the top surface of the substrate and flexibly coupled to the bonding pads by flexures, such that the outer member is capable of oscillatory motion relative to the substrate and about a drive axis that is in the plane of the outer member and orthogonal to the input axis, the outer member defining a central opening bordered by a generally circular inner perimeter;
a generally planar plate inner member coplanar with and located within the central opening of the outer member, the inner member flexibly coupled to the outer member such that the inner member is capable of rotary oscillatory motion relative to the outer member about an output axis that is orthogonal to the plane of the members in response to input rotation rate, and such that the inner member will oscillate with the outer member relative to the substrate about the drive axis, as the outer member is oscillated about the drive axis;
one or more outer member drives for directly oscillating the outer member about the drive axis, and thereby also oscillating the inner member about the drive axis;
one or more drive axis motion sensors that sense motion of the inner member or the outer member about the drive axis and have an output signal related to the sensed motion; and
one or more inner member sensors that detect oscillation of the inner member relative to the outer member about the output axis and have an output signal related to the detected oscillation.
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Accused Products
Abstract
A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar outer member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis that is orthogonal to the input axis. There is also a generally planar inner member coplanar with and flexibly coupled to the outer member such that it is capable of rotary oscillatory motion relative to the outer member about an output axis that is orthogonal to the plane of the members. There are one or more drives for directly or indirectly oscillating the outer member about the drive axis, and one or more sensors that detect oscillation of the inner member about the output axis.
17 Citations
36 Claims
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1. A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis that lies in the plane, comprising:
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a substrate defining a top surface; spaced bonding pads coupled to the substrate and projecting above the top surface of the substrate; a generally planar plate outer member spaced above and essentially parallel to the top surface of the substrate and flexibly coupled to the bonding pads by flexures, such that the outer member is capable of oscillatory motion relative to the substrate and about a drive axis that is in the plane of the outer member and orthogonal to the input axis, the outer member defining a central opening bordered by a generally circular inner perimeter; a generally planar plate inner member coplanar with and located within the central opening of the outer member, the inner member flexibly coupled to the outer member such that the inner member is capable of rotary oscillatory motion relative to the outer member about an output axis that is orthogonal to the plane of the members in response to input rotation rate, and such that the inner member will oscillate with the outer member relative to the substrate about the drive axis, as the outer member is oscillated about the drive axis; one or more outer member drives for directly oscillating the outer member about the drive axis, and thereby also oscillating the inner member about the drive axis; one or more drive axis motion sensors that sense motion of the inner member or the outer member about the drive axis and have an output signal related to the sensed motion; and one or more inner member sensors that detect oscillation of the inner member relative to the outer member about the output axis and have an output signal related to the detected oscillation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis that lies in the plane, comprising:
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a substrate defining a top surface; a mounting post coupled to the substrate and projecting above the top surface of the substrate; a generally planar plate ring member spaced above and essentially parallel to the top surface of the substrate and defining a central opening, the ring member flexibly coupled to the mounting post by a plurality of radial flexures, such that the post is centrally located within the central opening of the ring member; a generally planar plate gyro member located outside of and coplanar with the ring member, the gyro member defining a central opening within which the ring member is located, the gyro member central opening bordered by a generally circular inner perimeter, the gyro member flexibly coupled to the ring member with a pair of colinear torsional flexures such that the gyro member is capable of oscillatory motion relative to the plane of the ring member and relative to the substrate about a drive axis that is in the plane of the gyro member and orthogonal to the input axis, and such that the gyro member will oscillate with the ring member about an output axis that is orthogonal to the plane of the gyro member and the ring member; wherein the ring member together with the gyro member is capable of rotary oscillatory motion about the output axis; one or more gyro member drives for directly oscillating the gyro member about the drive axis; one or more gyro member motion sensors that sense motion of the gyro member about the drive axis and have an output signal related to the sensed motion; and one or more oscillation sensors that detect oscillation of the ring member and the gyro member about the output axis and have an output signal related to the detected oscillation. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification