Electrostatic pressure sensor with porous dielectric diaphragm
First Claim
1. A pressure sensor comprising:
- a first pressure chamber containing fill fluid at a first pressure;
a second pressure chamber containing fill fluid at a second pressure;
a porous dielectric diaphragm comprising a porous polymer membrane having a first major surface exposed to the first pressure chamber and a second major surface exposed to the second pressure chamber;
a first contact electrode positioned in contact with the first major surface; and
a second contact electrode positioned in contact with the second major surface;
wherein a potential signal is induced across the first and second electrodes by a potential generated across the first and second major surfaces of the porous dielectric diaphragm.
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Abstract
A pressure sensor comprises a first pressure chamber containing fill fluid at a first pressure, a second pressure chamber containing fill fluid at a second pressure, a porous dielectric diaphragm having first and second major surfaces exposed to the first and second pressure chambers, and first and second electrodes positioned with respect to the first and second major surfaces. A method for sensing pressure is also disclosed, comprising applying first and second pressures to fill fluid in first and second pressure chambers of a pressure sensor having a porous dielectric diaphragm, and producing an output representative of a pressure differential between the pressures, as a function of surface charges on first and second major surfaces of the porous dielectric diaphragm.
45 Citations
29 Claims
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1. A pressure sensor comprising:
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a first pressure chamber containing fill fluid at a first pressure; a second pressure chamber containing fill fluid at a second pressure; a porous dielectric diaphragm comprising a porous polymer membrane having a first major surface exposed to the first pressure chamber and a second major surface exposed to the second pressure chamber; a first contact electrode positioned in contact with the first major surface; and a second contact electrode positioned in contact with the second major surface; wherein a potential signal is induced across the first and second electrodes by a potential generated across the first and second major surfaces of the porous dielectric diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A pressure sensor, comprising:
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a first pressure chamber; a second pressure chamber; a porous dielectric diaphragm that divides the first pressure chamber, at a first major surface of the diaphragm, from the second pressure chamber, at a second major surface of the diaphragm; a first contact electrode positioned in contact with the first major surface of the porous dielectric diaphragm, such that the first contact electrode responds to a first surface charge on the first major surface of the diaphragm; a second contact electrode positioned in contact with the second major surface of the porous dielectric diaphragm, such that the second contact electrode responds to a second surface charge on the second major surface of the diaphragm; first and second parallel spaced electrodes positioned generally parallel to the porous dielectric diaphragm and spaced from the first and second major surfaces of the porous dielectric diaphragm; and a fill fluid that flows through the diaphragm in response to a pressure differential between the first pressure and the second pressure. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A method for sensing pressure, the method comprising:
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applying first and second pressures to fill fluid in first and second pressure chambers of a pressure sensor having a porous dielectric diaphragm, the porous dielectric diaphragm comprising a porous polymer membrane having first and second major surfaces exposed to the first and second pressure chambers; sensing a potential induced on first and second contact electrodes positioned in contact with the first and second major surfaces of the porous dielectric diaphragm; and producing an output representative of a pressure differential between the first and second pressures based on the potential induced on the first and second contact electrodes, wherein the potential is a function of surface charges on the first and second major surfaces of the porous dielectric diaphragm. - View Dependent Claims (20, 21, 22, 23, 24)
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25. A pressure sensor comprising:
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a first pressure chamber containing fill fluid at a first pressure; a second pressure chamber containing fill fluid at a second pressure; a porous dielectric diaphragm having a first major surface exposed to the first pressure chamber and a second major surface exposed to the second pressure chamber; a first electrode positioned with respect to the first major surface; and a second electrode positioned with respect to the second major surface; wherein a potential signal is induced across the first and second electrodes by a potential generated across the first and second major surfaces of the porous dielectric diaphragm; and wherein the porous dielectric diaphragm comprises one or more of a porous thin film of carbon nanotubes, a porous thin film of carbon nanofibers, or a porous carbon nanotube mat. - View Dependent Claims (26, 27, 28)
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29. A pressure sensor comprising:
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a first pressure chamber containing fill fluid at a first pressure; a second pressure chamber containing fill fluid at a second pressure; a porous dielectric diaphragm having a first major surface exposed to the first pressure chamber and a second major surface exposed to the second pressure chamber; a first electrode positioned with respect to the first major surface; and a second electrode positioned with respect to the second major surface; wherein a potential signal is induced across the first and second electrodes by a potential generated across the first and second major surfaces of the porous dielectric diaphragm; and wherein the fill fluid comprises a fluid colloid, the fluid colloid comprising a non-polar dispersing phase and one of an electrolytic dispersed phase or a polar dispersed phase.
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Specification