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Thermal processing apparatus and thermal processing method for object to be processed

  • US 8,080,767 B2
  • Filed: 06/10/2009
  • Issued: 12/20/2011
  • Est. Priority Date: 06/11/2008
  • Status: Active Grant
First Claim
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1. A thermal processing apparatus comprising:

  • a processing vessel capable of being evacuated, the processing vessel also being capable of accommodating, in addition to a plurality of objects to be processed, an object for temperature measurement equipped with an acoustic wave device;

    a holding unit configured to be loaded into and unloaded from the processing vessel, while holding the plurality of objects to be processed and the object for temperature measurement;

    a gas introduction unit configured to introduce a gas into the processing vessel;

    a heating unit configured to heat the plurality of objects to be processed and the object for temperature measurement that are accommodated in the processing vessel;

    a first conductive member configured to function as a transmitter antenna connected to a transmitter through a radiofrequency line, for transmitting an electromagnetic wave for measurement toward the acoustic wave device accommodated in the processing vessel;

    a second conductive member configured to function as a receiver antenna connected to a receiver through a radiofrequency line, for receiving an electromagnetic wave dependent on a temperature of the acoustic wave device which is emitted from the acoustic wave device accommodated in the processing vessel;

    a temperature analysis part configured to obtain a temperature of the object for temperature measurement based on the electromagnetic wave received by the receiver antenna; and

    a temperature control part configured to control the heating unit;

    wherein;

    the first conductive member is disposed as a part of a thermal processing part in the processing vessel;

    the second conductive member is disposed as a part of a thermal processing part in the processing vessel; and

    the radiofrequency line is provided with a radiofrequency filter part that transmits a radiofrequency component but cuts a low frequency component and a direct-current component.

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