Thermal processing apparatus and thermal processing method for object to be processed
First Claim
1. A thermal processing apparatus comprising:
- a processing vessel capable of being evacuated, the processing vessel also being capable of accommodating, in addition to a plurality of objects to be processed, an object for temperature measurement equipped with an acoustic wave device;
a holding unit configured to be loaded into and unloaded from the processing vessel, while holding the plurality of objects to be processed and the object for temperature measurement;
a gas introduction unit configured to introduce a gas into the processing vessel;
a heating unit configured to heat the plurality of objects to be processed and the object for temperature measurement that are accommodated in the processing vessel;
a first conductive member configured to function as a transmitter antenna connected to a transmitter through a radiofrequency line, for transmitting an electromagnetic wave for measurement toward the acoustic wave device accommodated in the processing vessel;
a second conductive member configured to function as a receiver antenna connected to a receiver through a radiofrequency line, for receiving an electromagnetic wave dependent on a temperature of the acoustic wave device which is emitted from the acoustic wave device accommodated in the processing vessel;
a temperature analysis part configured to obtain a temperature of the object for temperature measurement based on the electromagnetic wave received by the receiver antenna; and
a temperature control part configured to control the heating unit;
wherein;
the first conductive member is disposed as a part of a thermal processing part in the processing vessel;
the second conductive member is disposed as a part of a thermal processing part in the processing vessel; and
the radiofrequency line is provided with a radiofrequency filter part that transmits a radiofrequency component but cuts a low frequency component and a direct-current component.
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Accused Products
Abstract
A thermal processing apparatus comprising a processing vessel containing, in addition to a plurality of objects subject to heat treatment, an acoustic wave device for temperature measurement. A holding unit holds the plurality of objects to be processed and an object for temperature measurement utilizing an acoustic wave device. A heating unit heats the objects to be processed and the object for temperature measurement. A first conductive member functions as an antenna for transmitting an electromagnetic wave toward the acoustic wave device in the processing vessel; a second conductive member functions as a receiver antenna for receiving an electromagnetic wave dependent on a temperature of the acoustic wave device which is emitted from the acoustic wave device. A temperature analysis part obtains a temperature of the object based on the electromagnetic wave received by the receiver antenna, and a temperature control part controls the heating unit. The first and second conductive members are each part of the thermal processing parts in the processing vessel.
15 Citations
40 Claims
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1. A thermal processing apparatus comprising:
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a processing vessel capable of being evacuated, the processing vessel also being capable of accommodating, in addition to a plurality of objects to be processed, an object for temperature measurement equipped with an acoustic wave device; a holding unit configured to be loaded into and unloaded from the processing vessel, while holding the plurality of objects to be processed and the object for temperature measurement; a gas introduction unit configured to introduce a gas into the processing vessel; a heating unit configured to heat the plurality of objects to be processed and the object for temperature measurement that are accommodated in the processing vessel; a first conductive member configured to function as a transmitter antenna connected to a transmitter through a radiofrequency line, for transmitting an electromagnetic wave for measurement toward the acoustic wave device accommodated in the processing vessel; a second conductive member configured to function as a receiver antenna connected to a receiver through a radiofrequency line, for receiving an electromagnetic wave dependent on a temperature of the acoustic wave device which is emitted from the acoustic wave device accommodated in the processing vessel; a temperature analysis part configured to obtain a temperature of the object for temperature measurement based on the electromagnetic wave received by the receiver antenna; and a temperature control part configured to control the heating unit; wherein; the first conductive member is disposed as a part of a thermal processing part in the processing vessel; the second conductive member is disposed as a part of a thermal processing part in the processing vessel; and the radiofrequency line is provided with a radiofrequency filter part that transmits a radiofrequency component but cuts a low frequency component and a direct-current component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A thermal processing apparatus comprising:
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a processing vessel capable of being evacuated, the processing vessel also being capable of accommodating, in addition to a plurality of objects to be processed, an object for temperature measurement equipped with an acoustic wave device; a holding unit configured to be loaded into and unloaded from the processing vessel, while holding the plurality of objects to be processed and the object for temperature measurement; a gas introduction unit configured to introduce a gas into the processing vessel; a heating unit configured to heat the plurality of objects to be processed and the object for temperature measurement that are accommodated in the processing vessel; a first conductive member configured to function as a transmitter antenna connected to a transmitter through a radiofrequency line, for transmitting an electromagnetic wave for measurement toward the acoustic wave device accommodated in the processing vessel; a second conductive member configured to function as a receiver antenna connected to a receiver through a radiofrequency line, for receiving an electromagnetic wave dependent on a temperature of the acoustic wave device which is emitted from the acoustic wave device accommodated in the processing vessel; a temperature analysis part configured to obtain a temperature of the object for temperature measurement based on the electromagnetic wave received by the receiver antenna; a temperature control part configured to control the heating unit; and a temperature measuring unit disposed in the processing vessel and/or on the heating unit; wherein; the first conductive member is disposed as a part of the temperature measuring unit; the second conductive member is disposed as a part of the temperature measuring unit; and the radiofrequency line is provided with a radiofrequency filter part that transmits a radiofrequency component but cuts a low frequency component and a direct-current component. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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36. A thermal processing method for an object to be processed in which a holding unit holding an object for temperature measurement equipped with an acoustic wave device and a plurality of objects to be processed is loaded into a processing vessel, and the objects to be processed are heated by a heating unit so as to be thermally processed, the thermal processing method comprising:
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transmitting an electromagnetic wave for measurement from a transmitter antenna disposed on the processing vessel to the object for temperature measurement; receiving an electromagnetic wave emitted by the acoustic wave device of the object for temperature measurement after the acoustic wave device has received the electromagnetic wave for measurement, by a receiver antenna disposed on the processing vessel; obtaining a temperature of the object for temperature measurement based on the electromagnetic wave received by the receiver antenna; and controlling the heating unit based on the obtained temperature; wherein, the step of transmitting includes filtering the electromagnetic wave to transmit a radiofrequency component, but to cut a low frequency component and a direct-current component. - View Dependent Claims (37, 38, 39, 40)
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Specification