Ozone concentration sensor
First Claim
1. An apparatus for measuring an attribute of ozone in an ozonated liquid, the apparatus comprising:
- a delivery pipeline to carry the ozonated liquid to a process tool, the delivery pipeline including a plurality of reflection sites;
a light source that directs a first band of visible light and a second band of visible light through the ozonated liquid in the delivery pipeline along a substantially shared path defined in part by the plurality of reflection sites, wherein ozone in the ozonated liquid has a greater absorption with the first band of visible light than with the second band of visible light; and
a photosensor that senses the first band of visible light and the second band of visible light passing through the ozonated liquid for measuring an attribute to the ozone in the ozonated liquid, wherein the plurality of reflection sites increase a length of the substantially shared path.
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Accused Products
Abstract
An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.
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Citations
26 Claims
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1. An apparatus for measuring an attribute of ozone in an ozonated liquid, the apparatus comprising:
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a delivery pipeline to carry the ozonated liquid to a process tool, the delivery pipeline including a plurality of reflection sites; a light source that directs a first band of visible light and a second band of visible light through the ozonated liquid in the delivery pipeline along a substantially shared path defined in part by the plurality of reflection sites, wherein ozone in the ozonated liquid has a greater absorption with the first band of visible light than with the second band of visible light; and a photosensor that senses the first band of visible light and the second band of visible light passing through the ozonated liquid for measuring an attribute to the ozone in the ozonated liquid, wherein the plurality of reflection sites increase a length of the substantially shared path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An ozonated water generator, comprising:
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a contactor for introducing ozone gas into water to produce ozonated water; a delivery pipeline in fluid communication with the contactor for delivery of ozonated water to a process tool, the delivery pipeline including a plurality of reflection sites that define a path; a light source that directs a first band of visible light and a second band of visible light substantially along the path through the ozonated water in the delivery pipeline, wherein ozone in the ozonated water has a great absorption with the first band of visible light than with the second band of visible light, and wherein the plurality of reflection sites increase a length of the path; and
a photosensor that senses the first band of visible light and the second band of visible light.
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15. A method for measuring an attribute of ozone in an ozonated liquid, the method comprising:
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selecting a first band of visible light for which ozone has a greater band of absorption than for a second band of visible light; directing the first and second bands of visible light through a delivery pipeline including a plurality of reflection sites; sensing the first and second bands of visible light after the first and second bands of visible blight pass along a substantially shared path through the ozonated liquid, the substantially shared path being defined in part by the plurality of reflection sites; and determining the attribute of the ozone based on the sensed first and second bands of visible light, wherein the plurality of reflection sites increase a length of the substantially shared path. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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24. An apparatus for measuring an attribute of ozone in an ozonated fluid, the apparatus comprising:
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a vessel to contain the ozonated fluid for delivery to a semiconductor process tool; a light source configured to direct a first band of visible light and a second band of visible light along a substantially shared path though the ozonated fluid in the vessel, the substantially shared path defined in part by a plurality of reflections, wherein the constituent has a greater absorption associated with the first band of visible light than with the second band of visible light; and a photosensor that senses the first band of visible light and the second band of visible light passing along the substantially shared path, wherein the plurality of reflections increase a length of the substantially shared path. - View Dependent Claims (25, 26)
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Specification