Diffusion barrier layer for MEMS devices

• US 8,085,458 B2
• Filed: 11/06/2009
• Issued: 12/27/2011
• Est. Priority Date: 10/28/2005
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Wang, Hsin-Fu, Tung, Ming-Hau, Zee, Stephen
• Primary Examiner(s): Choi, William
• Assistant Examiner(s): TRA, TUYEN Q
• Application Number:
  US12/614,311
• Publication Number:
  US 20100046058A1
• Time in Patent Office: 781 Days
• Field of Search: 359/237, 359/223, 359/224, 359/290, 359/291, 359/292, 359/295, 359/298, 359/900, 438/653, 438/643, 257/751, 257/E23.16
• US Class Current: 359/237
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: B81C 1/00793 Avoid contamination, e.g. absorption of impurities or oxidation
• CPC Class Codes: B81C 2201/0167 by adding further layers of materials having complementary strains, i.e. compressive or tensile strain
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

Described herein is the use of a diffusion barrier layer between metallic layers in MEMS devices. The diffusion barrier layer prevents mixing of the two metals, which can alter desired physical characteristics and complicate processing. In one example, the diffusion barrier layer may be used as part of a movable reflective structure in interferometric modulators.

Claims

1. A method of manufacturing a MEMS device, comprising:

depositing a first metallic layer comprising a first metal;

depositing a diffusion barrier layer onto the first metallic layer;

depositing a second metallic layer comprising a second metal onto the diffusion barrier layer, wherein the diffusion barrier layer is adapted to substantially inhibit any portion of the first metallic layer from mixing with any portion of the second metallic layer; and

etching a same pattern in the first metallic layer, diffusion barrier layer, and second metallic layer,

wherein etching the pattern in the second metallic layer comprises using a first etchant capable of etching the second metal but not an alloy of the first and second metal, and

wherein etching the pattern in the first metallic layer comprises using a second etchant capable of etching the first metal but not an alloy of the first and second metal.

2. The method of claim 1, wherein the first metallic layer comprises aluminum.

3. The method of claim 1, wherein the second metallic layer comprises chromium.

4. The method of claim 1, wherein the diffusion barrier layer comprises an oxide, nitride, or carbide.

5. The method of claim 1, wherein the diffusion barrier layer comprises silicon dioxide.

6. The method of claim 1, wherein etching a same pattern comprises employing different etchants for each of the first metallic layer, diffusion barrier layer, and second metallic layer.

7. A MEMS device, comprising a mechanical membrane produced by the process of claim 1.

8. A method of manufacturing an interferometric modulator, comprising:

depositing a first metallic layer comprising a first metal;

depositing a diffusion barrier layer onto the first metallic layer;

depositing a second metallic layer comprising a second metal onto the diffusion barrier layer, wherein the diffusion barrier layer is adapted to substantially inhibit any portion of the first metallic layer from mixing with any portion of the second metallic layer; and

etching a same pattern in the second metallic layer, the diffusion barrier, and the first metallic layer,

wherein etching the pattern in the second metallic layer comprises using a first etchant capable of etching the second metal but not an alloy of the first and second metal.

9. The method of claim 8, wherein etching the pattern in the diffusion barrier comprises using a second etchant, and etching the pattern in the first metallic layer comprises using a third etchant capable of etching the first metal but not an alloy of the first and second metal.

10. The method of claim 9, wherein the diffusion barrier layer and the second metallic layer are substantially resistant to the third etchant.

11. The method of claim 9, wherein the third etchant is PAN.

12. The method of claim 8, wherein the diffusion barrier layer comprises an oxide, nitride, or carbide.

13. The method of claim 8, wherein the diffusion barrier layer comprises silicon dioxide.

14. The method of claim 8, wherein the diffusion barrier layer and the first metallic layer are substantially resistant to the first etchant.

15. The method of claim 8, wherein the first metallic layer and the second metallic layer are substantially resistant to the second etchant.

16. The method of claim 8, wherein the first etchant is CR14.

17. The method of claim 8, wherein the second etchant is PAD.

18. An interferometric modulator produced by the process of claim 8.

19. A method of manufacturing a movable electrode in a MEMS device, the method comprising:

forming one or more first layers of the movable electrode, the first layer(s) comprising a first material and having tensile stress, the first material comprising a first metal;

forming one or more second layers of the movable electrode adjacent to the first layer(s), the second layer(s) comprising a second material and having compressive stress;

forming one or more third layers of the movable electrode, the third layer(s) comprising a third material and having tensile stress, the third material comprising a second metal; and

etching a pattern in the one or more third layers using a first etchant capable of etching the second metal but not an alloy of the first and second metal,

whereby a combination of the first, second, and third layers provides a tensile residual stress for the movable electrode.

20. The method of claim 19, wherein the first metal is selected from the group consisting of aluminum, chromium, titanium, copper, iron, silicon, manganese, magnesium, lithium, silver, gold, nickel, tantalum, and tungsten.

21. The method of claim 19, wherein the second material is one or more of oxide, nitride, or carbide.

22. The method of claim 19, wherein at least one of the second layers comprises silicon dioxide.

23. A MEMS device movable electrode produced by the process of claim 19.

24. The method of claim 19, wherein the one or more second layers are between the one or more first layers and the one or more third layers.

25. The method of claim 19, further comprising etching a pattern in the one or more first layers using a second etchant capable of etching the first metal but not an alloy of the first and second metal.

26. The method of claim 19, wherein the tensile stress is between about 100MPa and 500 MPa.