Angular velocity sensor

• US 8,087,296 B2
• Filed: 03/07/2007
• Issued: 01/03/2012
• Est. Priority Date: 03/15/2006
• Status: Active Grant

• Current Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Original Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Inventors: Ueda, Shinjiro, Mouri, Hiroaki, Nakashima, Koichiro
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US12/162,417
• Publication Number:
  US 20090165557A1
• Time in Patent Office: 1,763 Days
• Field of Search: 734/93, 735/041.2, 735/041.6
• US Class Current: 73/504.16
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48227 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/97 the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/19105 in a side-by-side arrangement on a common die mounting substrate

Abstract

An angular velocity sensor includes a substrate having an upper surface having a first recess provided therein, an electronic component mounted in the first recess, and a vibration element mounted onto the upper surface of the substrate. The first vibration element has a portion located directly above the electronic component. This angular velocity sensor has a small size.

Claims

1. An angular velocity sensor comprising:

a substrate having an upper surface, the upper surface having a first recess provided therein;

an electronic component mounted in the first recess; and

a first vibration element mounted onto the upper surface of the substrate and connected electrically to the electronic component, the first vibration element having a portion located directly above the electronic component,

wherein the upper surface of the substrate has a second recess provided therein, the second recess (i) being located beneath the first vibration element, (ii) being shallower than the first recess, and (iii) communicating with the first recess,

wherein the upper surface of the substrate has a first joint portion joined directly to the first vibration element,

wherein the second recess is located between the first joint portion and the first recess,

wherein the second recess has a bottom, and

wherein the first vibration element directly faces the bottom of the second recess.

2. The angular velocity sensor of claim 1, further comprising an electrode provided on a bottom of the first recess,

wherein the electronic component includes:

a lower surface facing the bottom of the first recess; and

a terminal provided on the lower surface of the electronic component, the terminal being joined to the electrode on the bottom of the first recess.

3. The angular velocity sensor of claim 1,

wherein the first vibration element has a tuning fork shape including (i) a plurality of legs having respective ends and (ii) a base being connected to the respective ends of the plurality of legs, and

wherein the portion of the first vibration element includes at least a portion of the plurality of legs.

4. The angular velocity sensor of claim 1, further comprising a second vibration element mounted onto the substrate,

wherein the first vibration element has a first detection axis for detecting an angular velocity, and

wherein the second vibration element has a second detection axis perpendicular to the first detection axis.

5. The angular velocity sensor of claim 4, wherein the upper surface of the substrate has a third recess provided therein, the third recess (i) being located beneath the second vibration element, (ii) being shallower than the first recess, and (ii) communicating with the first recess.

6. The angular velocity sensor of claim 5,

wherein the upper surface of the substrate has a second joint portion joined to the second vibration element, and

wherein the third recess is located between the second joint portion and the first recess.

7. The angular velocity sensor of claim 4, further comprising:

a case mounted to the upper surface of the substrate, the case covering the first vibration element, the second vibration element, and the first recess; and

an adhesive for joining the case to the upper surface of the substrate such that a gap is provided between the case and the upper surface of the substrate.

8. The angular velocity sensor of claim 4, further comprising:

an electrode provided on the upper surface of the substrate;

a component connected to the electrode;

a conductive adhesive for joining the component to the electrode, the conductive adhesive containing thermosetting resin;

a first adhesive for joining the second vibration element to the upper surface of the substrate, the first adhesive being made of thermosetting resin; and

a second adhesive for joining the electronic component to the first recess, the second adhesive being made of thermosetting resin.

9. The angular velocity sensor of claim 1, further comprising an adhesive for joining the electronic component to the first recess,

wherein the first recess has:

a mounting portion facing the electronic component; and

an injection portion communicating with the mounting portion and exposed to the electronic component, the injection portion allowing the adhesive to inject thereto.

10. The angular velocity sensor of claim 9, wherein the second recess communicates directly with the injection portion of the first recess.

11. The angular velocity sensor of claim 1, further comprising:

a case mounted to the upper surface of the substrate, the case covering the first vibration element and the first recess; and

an adhesive for joining the case to the upper surface of the substrate such that a gap is provided between the upper surface of the substrate and the case.

12. The angular velocity sensor of claim 1, further comprising:

an electrode provided on the upper surface of the substrate;

a component connected to the electrode;

a conductive adhesive for joining the component to the electrode, the conductive adhesive containing thermosetting resin;

a first adhesive for joining the first vibration element to the upper surface of the substrate, the first adhesive being made of thermosetting resin; and

a second adhesive for joining the electronic component to the bottom of the first recess, the second adhesive being made of thermosetting resin.