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Semiconductor device and method for manufacturing the same

  • US 8,089,144 B2
  • Filed: 12/10/2009
  • Issued: 01/03/2012
  • Est. Priority Date: 12/17/2008
  • Status: Active Grant
First Claim
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1. A semiconductor device comprising:

  • a sensor including a sensor structure and a periphery element, wherein the sensor structure is disposed on a first side of the sensor, and the periphery element surrounds the sensor structure; and

    a cap covering the sensor structure and having a second side, which is bonded to the first side of the sensor,wherein the cap includes a first wiring layer, which is disposed on the second side of the cap,wherein the first wiring layer steps over the periphery element,wherein the sensor further includes a sensor side connection portion, and the cap further includes a cap side connection portion,wherein the sensor side connection portion is bonded to the cap side connection portion,wherein at least one of the sensor side connection portion and the cap side connection portion provides an eutectic alloy so that the sensor side connection portion and the cap side connection portion are bonded to each other,wherein the sensor further includes a SOI substrate having a first conductive layer, an insulation layer, and a second conductive layer,wherein the first conductive layer, the insulation layer, and the second conductive layer are stacked in this order,wherein the sensor structure and the periphery element are disposed in the first conductive layer,wherein the insulation layer includes a contact portion, which is disposed between the periphery element and the second conductive layer,wherein the contact portion electrically couples the periphery element and the second conductive layer,wherein the cap further includes a conductive substrate,wherein the cap side connection portion is disposed on the conductive substrate,wherein the cap further includes a second wiring layer having a wiring portion and a sealing portion,wherein the wiring portion is electrically isolated from the sealing portion,wherein the wiring portion and the sealing portion provide the cap side connection portion,wherein the wiring portion is bonded to a part of the sensor structure via the eutectic alloy,wherein the sealing portion has a ring shape, which corresponds to the periphery element,wherein the sealing portion is bonded to the periphery element via the eutectic alloy, andwherein the periphery element, the contact portion, the second conductive layer, the sealing portion, and the conductive substrate are electrically coupled with each other so that the periphery element, the contact portion, the second conductive layer, the sealing portion, and the conductive substrate have the same electric potential.

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