Exposure apparatus, exposure method, and device manufacturing method
First Claim
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1. An exposure apparatus that exposes a substrate via a first liquid filled into an optical path space of exposure light, the apparatus comprising:
- an immersion space forming member that forms an immersion space to fill the optical path space with the first liquid, the immersion space forming member having a recovery port which recovers the first liquid forming the immersion space and a recovery passage connected to the recovery port, and the first liquid recovered from the recovery port being moved into the recovery passage; and
a temperature regulating system that suppresses a change in the temperature of the immersion space forming member, the temperature regulating system having a supply passage connected to the recovery passage, a temperature regulating fluid from the supply passage being supplied to the recovery passage not through the recovery port.
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Abstract
An exposure apparatus includes an immersion space forming member (70) which fills an optical path space (K1) for exposure light (EL) with a first liquid (LQ) to form an immersion space, and a temperature regulating mechanism (60) which suppresses a change in the temperature of the immersion space forming member (70) accompanying deactivation of formation of the immersion space.
63 Citations
31 Claims
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1. An exposure apparatus that exposes a substrate via a first liquid filled into an optical path space of exposure light, the apparatus comprising:
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an immersion space forming member that forms an immersion space to fill the optical path space with the first liquid, the immersion space forming member having a recovery port which recovers the first liquid forming the immersion space and a recovery passage connected to the recovery port, and the first liquid recovered from the recovery port being moved into the recovery passage; and a temperature regulating system that suppresses a change in the temperature of the immersion space forming member, the temperature regulating system having a supply passage connected to the recovery passage, a temperature regulating fluid from the supply passage being supplied to the recovery passage not through the recovery port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. An exposure method of exposing a substrate with exposure light via a liquid, the method comprising:
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exposing the substrate using an immersion space forming member that forms an immersion space to fill an optical path space for the exposure light with the liquid to form an immersion space; and suppressing a change in the temperature of the immersion space forming member by supplying a temperature regulating fluid to the recovery passage not through the recovery port. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31)
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Specification