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Miniscule-size photo-spectrometer units

  • US 8,089,626 B2
  • Filed: 05/01/2007
  • Issued: 01/03/2012
  • Est. Priority Date: 05/02/2006
  • Status: Active Grant
First Claim
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1. A method for manufacturing a photo-spectrometer unit for use with a spectrometry system, said photo-spectrometer unit having an upstream side and a downstream side, and said spectrometry system having a source of radiation illuminating a sample and an optical guide for guiding radiation exiting from the sample into the photo-spectrometer unit, said photo-spectrometer unit comprising:

  • at least one optical element for receiving input radiation exiting from the sample, and electronic elements including;

    a detector formed downstream of at least one optical element and configured for receiving radiation exiting from the sample and for outputting electrical measurable signals, anda processor configured for processing the electrical measurable signals received from the detector, and for outputting spectrometry result output signals,the method comprising the steps of;

    forming the photo-spectrometer unit as a chip of a substrate material, said chip having a monolithic structure with the at least one optical element formed integrally therefrom, and said chip having a generally planar first surface on which said at least one optical element is formed such that, in operation, said input radiation travels into and exits out of said at least one optical element generally parallel to said first surface, said first surface being separated by a thickness of substrate material from a second, opposite surface, andforming the electronic elements on said second surface of said chip.

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