Miniscule-size photo-spectrometer units
First Claim
1. A method for manufacturing a photo-spectrometer unit for use with a spectrometry system, said photo-spectrometer unit having an upstream side and a downstream side, and said spectrometry system having a source of radiation illuminating a sample and an optical guide for guiding radiation exiting from the sample into the photo-spectrometer unit, said photo-spectrometer unit comprising:
- at least one optical element for receiving input radiation exiting from the sample, and electronic elements including;
a detector formed downstream of at least one optical element and configured for receiving radiation exiting from the sample and for outputting electrical measurable signals, anda processor configured for processing the electrical measurable signals received from the detector, and for outputting spectrometry result output signals,the method comprising the steps of;
forming the photo-spectrometer unit as a chip of a substrate material, said chip having a monolithic structure with the at least one optical element formed integrally therefrom, and said chip having a generally planar first surface on which said at least one optical element is formed such that, in operation, said input radiation travels into and exits out of said at least one optical element generally parallel to said first surface, said first surface being separated by a thickness of substrate material from a second, opposite surface, andforming the electronic elements on said second surface of said chip.
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Accused Products
Abstract
A device and a method for implementing a photo-spectrometer unit (20), or PSU (20), for use with a spectrometry system (100) having optical means (12), and electronic means (13) is disclosed. The PSU is formed in a two-step manufacturing process to form a chip having a monolithic structure. The chip has a first surface and second surface. During the first manufacturing process step, optical means are integrally formed on the first surface (301), and during the second manufacturing process step, electronic means are formed on the second surface (302). The chip is transparent to electromagnetic radiations, and the PSU has at least one optical deflecting element (32) for guiding received radiations through the chip, for establishing direct optical path coupling between an optical element formed on the first surface and an electronic element formed on the second surface.
13 Citations
23 Claims
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1. A method for manufacturing a photo-spectrometer unit for use with a spectrometry system, said photo-spectrometer unit having an upstream side and a downstream side, and said spectrometry system having a source of radiation illuminating a sample and an optical guide for guiding radiation exiting from the sample into the photo-spectrometer unit, said photo-spectrometer unit comprising:
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at least one optical element for receiving input radiation exiting from the sample, and electronic elements including; a detector formed downstream of at least one optical element and configured for receiving radiation exiting from the sample and for outputting electrical measurable signals, and a processor configured for processing the electrical measurable signals received from the detector, and for outputting spectrometry result output signals, the method comprising the steps of; forming the photo-spectrometer unit as a chip of a substrate material, said chip having a monolithic structure with the at least one optical element formed integrally therefrom, and said chip having a generally planar first surface on which said at least one optical element is formed such that, in operation, said input radiation travels into and exits out of said at least one optical element generally parallel to said first surface, said first surface being separated by a thickness of substrate material from a second, opposite surface, and forming the electronic elements on said second surface of said chip. - View Dependent Claims (2, 3, 4, 5, 6, 16, 17, 18, 19)
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7. A photo-spectrometer unit for use with a spectrometry system, said spectrometry system having an upstream side and a downstream side, and having a source of radiation for illuminating a sample and an optical guide for guiding radiation exiting from the sample into the photo-spectrometer unit, said photo-spectrometer unit comprising:
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at least one optical element for receiving input radiation exiting from the sample, and electronic elements including; a detector formed downstream of at least one optical element, the detector being configured for receiving radiation exiting from the sample and for outputting electrical measurable signals, and a processor configured for processing the electrical measurable signals received from the detector, and for outputting spectrometry result output signals, said photo-spectrometer unit being formed as a chip of a substrate material, said chip having a monolithic structure with the at least one optical element formed integrally therefrom, and said chip having a generally planar first surface and a second surface located on opposite sides of a thickness of substrate material, said at least one optical element being formed on said first surface such that, in operation, said input radiation travels into and exits out of said at least one optical element generally parallel to said first surface, and said electronic elements being formed on said second surface. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15)
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20. A method for manufacturing a photo-spectrometer unit for use with a spectrometry system, said photo-spectrometer unit having an upstream side and a downstream side, and said spectrometry system having a source of radiation illuminating a sample and an optical guide for guiding radiation exiting from the sample into the photo-spectrometer unit, said photo-spectrometer unit comprising:
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a plurality of optical elements, said plurality of optical elements comprising a first optical element and an optical deflecting element, and electronic elements including; a detector formed downstream of said plurality of optical elements and configured for receiving radiation exiting from the sample and for outputting electrical measurable signals, and a processor configured for processing the electrical measurable signals received from the detector, and for outputting spectrometry result output signals, the method comprising the steps of; forming the photo-spectrometer unit as a chip of a substrate material, said chip having a monolithic structure with the plurality of optical elements formed integrally therefrom, and said chip having a generally planar first surface on which said plurality of optical elements are formed such that, in operation, said input radiation travels into and exits out of said first optical element generally parallel to said first surface, and into said optical deflecting element for guidance through the substrate material in a direction that is non-parallel to said first surface, said first surface being separated by a thickness of substrate material from a second, opposite surface; and forming the electronic elements on said second surface of said chip; wherein the substrate material is transparent to electromagnetic radiation; and wherein said optical deflecting element is configured to establish optical path coupling between an optical element formed on the first surface and an electronic element formed on the second surface. - View Dependent Claims (21)
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22. A photo-spectrometer unit for use with a spectrometry system, said spectrometry system having an upstream side and a downstream side, and having a source of radiation for illuminating a sample and an optical guide for guiding radiation exiting from the sample into the photo-spectrometer unit, said photo-spectrometer unit comprising:
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a plurality of optical elements, said plurality of optical elements comprising a first optical element and an optical deflecting element, and electronic elements including; a detector formed downstream of at least one optical element, the detector being configured for receiving radiation exiting from the sample and for outputting electrical measurable signals, and a processor configured for processing the electrical measurable signals received from the detector, and for outputting spectrometry result output signals, said photo-spectrometer unit being formed as a chip of a substrate material, said chip having a monolithic structure with the plurality of optical elements formed integrally therefrom, and said chip having a generally planar first surface and a second surface located on opposite sides of a thickness of substrate material, said first optical element and said optical deflecting element being formed on said first surface such that, in operation, said input radiation travels into and exits out of said first optical element generally parallel to said first surface, and into said optical deflecting element for guidance through the substrate material in a direction that is non-parallel to said first surface, and said electronic elements being formed on said second surface; wherein the substrate material is transparent to electromagnetic radiation; and wherein said optical deflecting element is configured to establish optical path coupling between an optical element formed on the first surface and an electronic element formed on the second surface. - View Dependent Claims (23)
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Specification