Module for coating both sides of a substrate in a single pass
First Claim
1. A module for carrying sputtering targets, said module comprising:
- an interface flange vacuum-tight mountable on a sputter deposition installation,wherein said installation is configured to coat a substrate having two sides, said interface flange including at least two elongated rotatable targets, with said rotatable targets being mountable to said interface flange,wherein each one of said rotatable targets comprises a magnet system configured to direct sputter deposition,wherein, when said module is mounted with said interface flange to said installation, said targets take positions at opposite sides of said two-sided substrate with each one of said magnet systems oriented towards said substrate, andwherein said module further includes at least one substrate support for supporting said substrate during coating so as to enable coating of both sides of said substrate in one operation.
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0 Petitions
Accused Products
Abstract
A module to carry targets in a sputter deposition installation for coating two-sided substrates is described. The module is mountable to the installation through an interface flange that carries at least two targets with their associated magnet systems. When the module is mounted, the targets take positions at opposite sides of the two-sided substrate, while the magnet systems orient the sputter deposition towards the substrate. The module enables coating of both sides of the substrate in one single pass. Different configurations are described with gas distribution systems and additional substrate supports. An enclosure with adjustable blinds in order to reduce gas spreading is also included.
15 Citations
12 Claims
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1. A module for carrying sputtering targets, said module comprising:
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an interface flange vacuum-tight mountable on a sputter deposition installation, wherein said installation is configured to coat a substrate having two sides, said interface flange including at least two elongated rotatable targets, with said rotatable targets being mountable to said interface flange, wherein each one of said rotatable targets comprises a magnet system configured to direct sputter deposition, wherein, when said module is mounted with said interface flange to said installation, said targets take positions at opposite sides of said two-sided substrate with each one of said magnet systems oriented towards said substrate, and wherein said module further includes at least one substrate support for supporting said substrate during coating so as to enable coating of both sides of said substrate in one operation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification