Three dimensional inductor and transformer design methodology of glass technology
First Claim
1. An inductor having a first port and a second port for use in an integrated circuit device, the inductor comprising:
- a high-resistivity substrate having a top-side, a bottom-side, a first sidewall and a second sidewall;
a plurality of substantially parallel top-side conductive traces on the top-side of the substrate;
a plurality of substantially parallel bottom-side conductive traces on the bottom-side of the substrate;
a plurality of sidewall conductive traces on the first sidewall of the substrate, each of the plurality of sidewall conductive traces on the first sidewall coupling one of the plurality of top-side conductive traces to one of the plurality of bottom-side conductive traces; and
a plurality of sidewall conductive traces on the second sidewall of the substrate, each of the plurality of sidewall conductive traces on the second sidewall coupling one of the plurality of top-side conductive traces to one of the plurality of bottom-side conductive traces;
the plurality of top-side conductive traces, bottom-side conductive traces and sidewall conductive traces forming a continuous conductive path from the first port to the second port of the inductor.
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Accused Products
Abstract
An inductor or transformer for use in integrated circuit devices that includes a high-resistivity substrate. The inductor includes a plurality of conductive traces around the substrate forming a continuous conductive path from a first to a second port. The conductive path can be solenoid-shaped. Some of the conductive traces can be formed during back-end-of-line processing or backside plating of an integrated circuit die. The transformer includes a first inductor with input and output ports, and a first continuous conductive path therebetween; and a second inductor with input and output ports, and a second continuous conductive path therebetween. The second inductor is independent of and electromagnetically coupled to the first inductor. The first and second conductive paths can be solenoid-shaped. The first conductive path can be interleaved with the second conductive path.
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Citations
23 Claims
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1. An inductor having a first port and a second port for use in an integrated circuit device, the inductor comprising:
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a high-resistivity substrate having a top-side, a bottom-side, a first sidewall and a second sidewall; a plurality of substantially parallel top-side conductive traces on the top-side of the substrate; a plurality of substantially parallel bottom-side conductive traces on the bottom-side of the substrate; a plurality of sidewall conductive traces on the first sidewall of the substrate, each of the plurality of sidewall conductive traces on the first sidewall coupling one of the plurality of top-side conductive traces to one of the plurality of bottom-side conductive traces; and a plurality of sidewall conductive traces on the second sidewall of the substrate, each of the plurality of sidewall conductive traces on the second sidewall coupling one of the plurality of top-side conductive traces to one of the plurality of bottom-side conductive traces; the plurality of top-side conductive traces, bottom-side conductive traces and sidewall conductive traces forming a continuous conductive path from the first port to the second port of the inductor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A transformer for use in integrated circuit devices, the transformer comprising:
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a high-resistivity substrate having a top-side, a bottom-side, a first sidewall and a second sidewall; a plurality of substantially parallel top-side conductive traces on the top-side of the substrate; a plurality of substantially parallel bottom-side conductive traces on the bottom-side of the substrate; a plurality of sidewall conductive traces on the first sidewall of the substrate, each of the plurality of sidewall conductive traces on the first sidewall coupling one of the plurality of top-side conductive traces to one of the plurality of bottom-side conductive traces; a plurality of sidewall conductive traces on the second sidewall of the substrate, each of the plurality of sidewall conductive traces on the second sidewall coupling one of the plurality of top-side conductive traces to one of the plurality of bottom-side conductive traces; a first inductor having an input port and an output port;
the first inductor being formed by a first set of the plurality of top-side conductive traces, a first set of the plurality of bottom-side conductive traces and a first set of the plurality of sidewall conductive traces;
the first sets of the plurality of top-side, bottom-side and sidewall conductive traces forming a first continuous conductive path from the input port to the output port of the first inductor; anda second inductor having an input port and an output port;
the second inductor being formed by a second set of the plurality of top-side conductive traces, a second set of the plurality of bottom-side conductive traces and a second set of the plurality of sidewall conductive traces;
the second sets of the plurality of top-side, bottom-side and sidewall conductive traces forming a second continuous conductive path from the input port to the output port of the second inductor;
the second continuous conductive path being independent of the first continuous conductive path;wherein the first inductor is electromagnetically coupled to the second inductor. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification